5/6/2011	10:44:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2011	10:44:17 AM	Recipe started at 10:44 AM
5/6/2011	10:44:17 AM	H2 valve closed
5/6/2011	10:44:17 AM	BCl3 valve closed
5/6/2011	10:44:17 AM	PH3 valve closed
5/6/2011	10:44:17 AM	SiCl4 pre valve closed
5/6/2011	10:44:17 AM	SiCl4 post valve closed
5/6/2011	10:44:17 AM	Main Vac valve closed
5/6/2011	10:44:17 AM	Bypass valve closed
5/6/2011	10:44:17 AM	Bubbler valve closed
5/6/2011	10:44:17 AM	Helium valve opened
5/6/2011	10:44:17 AM	Helium MFC set to  500.000000
5/6/2011	10:44:17 AM	H2 MFC set to  0.000000
5/6/2011	10:44:17 AM	BCl3 MFC set to  0.000000
5/6/2011	10:44:17 AM	PHl3 MFC set to  0.000000
5/6/2011	10:44:17 AM	SiCl4 MFC set to  0.000000
5/6/2011	10:44:17 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	10:44:17 AM	Tube furnace set to 0
5/6/2011	10:45:37 AM	Helium valve closed
5/6/2011	10:45:37 AM	H2 valve closed
5/6/2011	10:45:37 AM	BCl3 valve closed
5/6/2011	10:45:37 AM	PH3 valve closed
5/6/2011	10:45:37 AM	SiCl4 pre valve closed
5/6/2011	10:45:37 AM	SiCl4 post valve closed
5/6/2011	10:45:37 AM	Main Vac valve closed
5/6/2011	10:45:37 AM	Bypass valve closed
5/6/2011	10:45:37 AM	Bubbler valve closed
5/6/2011	10:45:37 AM	Helium MFC set to  0.000000
5/6/2011	10:45:37 AM	H2 MFC set to  0.000000
5/6/2011	10:45:37 AM	BCl3 MFC set to  0.000000
5/6/2011	10:45:37 AM	PHl3 MFC set to  0.000000
5/6/2011	10:45:37 AM	SiCl4 MFC set to  0.000000
5/6/2011	10:45:37 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	10:45:37 AM	Tube furnace set to 0
5/6/2011	10:45:37 AM	Run finished at 10:45 AM
5/6/2011	10:45:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2011	10:55:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	10:55:54 AM	Recipe started at 10:55 AM
5/6/2011	10:55:54 AM	Helium valve closed
5/6/2011	10:55:54 AM	H2 valve closed
5/6/2011	10:55:54 AM	BCl3 valve closed
5/6/2011	10:55:54 AM	PH3 valve closed
5/6/2011	10:55:54 AM	SiCl4 pre valve closed
5/6/2011	10:55:54 AM	SiCl4 post valve closed
5/6/2011	10:55:54 AM	Main Vac valve closed
5/6/2011	10:55:54 AM	Bubbler valve closed
5/6/2011	10:55:54 AM	Bypass valve opened
5/6/2011	10:55:54 AM	Helium MFC set to  0.000000
5/6/2011	10:55:54 AM	H2 MFC set to  0.000000
5/6/2011	10:55:54 AM	BCl3 MFC set to  0.000000
5/6/2011	10:55:54 AM	PHl3 MFC set to  0.000000
5/6/2011	10:55:54 AM	SiCl4 MFC set to  0.000000
5/6/2011	10:55:54 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	10:55:55 AM	Tube furnace set to 0
5/6/2011	10:56:27 AM	Helium valve closed
5/6/2011	10:56:27 AM	H2 valve closed
5/6/2011	10:56:27 AM	BCl3 valve closed
5/6/2011	10:56:27 AM	PH3 valve closed
5/6/2011	10:56:27 AM	SiCl4 pre valve closed
5/6/2011	10:56:27 AM	SiCl4 post valve closed
5/6/2011	10:56:27 AM	Bubbler valve closed
5/6/2011	10:56:27 AM	Main Vac valve opened
5/6/2011	10:56:27 AM	Bypass valve opened
5/6/2011	10:56:27 AM	Helium MFC set to  0.000000
5/6/2011	10:56:27 AM	H2 MFC set to  0.000000
5/6/2011	10:56:27 AM	BCl3 MFC set to  0.000000
5/6/2011	10:56:27 AM	PHl3 MFC set to  0.000000
5/6/2011	10:56:27 AM	SiCl4 MFC set to  0.000000
5/6/2011	10:56:27 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	10:56:28 AM	Tube furnace set to 0
5/6/2011	10:56:28 AM	Run finished at 10:56 AM
5/6/2011	10:56:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	11:34:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	11:35:01 AM	Recipe started at 11:34 AM
5/6/2011	11:35:01 AM	Helium valve closed
5/6/2011	11:35:01 AM	H2 valve closed
5/6/2011	11:35:01 AM	BCl3 valve closed
5/6/2011	11:35:01 AM	PH3 valve closed
5/6/2011	11:35:01 AM	SiCl4 pre valve closed
5/6/2011	11:35:01 AM	SiCl4 post valve closed
5/6/2011	11:35:01 AM	Main Vac valve closed
5/6/2011	11:35:01 AM	Bubbler valve closed
5/6/2011	11:35:01 AM	Bypass valve opened
5/6/2011	11:35:01 AM	Helium MFC set to  0.000000
5/6/2011	11:35:01 AM	H2 MFC set to  0.000000
5/6/2011	11:35:01 AM	BCl3 MFC set to  0.000000
5/6/2011	11:35:01 AM	PHl3 MFC set to  0.000000
5/6/2011	11:35:01 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:35:01 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:35:01 AM	Tube furnace set to 0
5/6/2011	11:35:02 AM	Helium valve closed
5/6/2011	11:35:02 AM	H2 valve closed
5/6/2011	11:35:02 AM	BCl3 valve closed
5/6/2011	11:35:02 AM	PH3 valve closed
5/6/2011	11:35:02 AM	SiCl4 pre valve closed
5/6/2011	11:35:02 AM	SiCl4 post valve closed
5/6/2011	11:35:02 AM	Bubbler valve closed
5/6/2011	11:35:02 AM	Main Vac valve opened
5/6/2011	11:35:02 AM	Bypass valve opened
5/6/2011	11:35:02 AM	Helium MFC set to  0.000000
5/6/2011	11:35:02 AM	H2 MFC set to  0.000000
5/6/2011	11:35:02 AM	BCl3 MFC set to  0.000000
5/6/2011	11:35:02 AM	PHl3 MFC set to  0.000000
5/6/2011	11:35:02 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:35:02 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:35:02 AM	Tube furnace set to 0
5/6/2011	11:36:02 AM	H2 valve closed
5/6/2011	11:36:02 AM	BCl3 valve closed
5/6/2011	11:36:02 AM	PH3 valve closed
5/6/2011	11:36:02 AM	SiCl4 pre valve closed
5/6/2011	11:36:02 AM	SiCl4 post valve closed
5/6/2011	11:36:02 AM	Bubbler valve closed
5/6/2011	11:36:02 AM	Helium valve opened
5/6/2011	11:36:02 AM	Main Vac valve opened
5/6/2011	11:36:02 AM	Bypass valve opened
5/6/2011	11:36:02 AM	Helium MFC set to  100.000000
5/6/2011	11:36:02 AM	H2 MFC set to  0.000000
5/6/2011	11:36:02 AM	BCl3 MFC set to  0.000000
5/6/2011	11:36:02 AM	PHl3 MFC set to  0.000000
5/6/2011	11:36:02 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:36:02 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:36:02 AM	Tube furnace set to 0
5/6/2011	11:37:02 AM	Helium valve closed
5/6/2011	11:37:02 AM	H2 valve closed
5/6/2011	11:37:02 AM	BCl3 valve closed
5/6/2011	11:37:02 AM	PH3 valve closed
5/6/2011	11:37:02 AM	SiCl4 pre valve closed
5/6/2011	11:37:02 AM	SiCl4 post valve closed
5/6/2011	11:37:02 AM	Bubbler valve closed
5/6/2011	11:37:02 AM	Main Vac valve opened
5/6/2011	11:37:02 AM	Bypass valve opened
5/6/2011	11:37:02 AM	Helium MFC set to  0.000000
5/6/2011	11:37:02 AM	H2 MFC set to  0.000000
5/6/2011	11:37:02 AM	BCl3 MFC set to  0.000000
5/6/2011	11:37:02 AM	PHl3 MFC set to  0.000000
5/6/2011	11:37:02 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:37:02 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:37:02 AM	Tube furnace set to 0
5/6/2011	11:38:02 AM	H2 valve closed
5/6/2011	11:38:02 AM	BCl3 valve closed
5/6/2011	11:38:02 AM	PH3 valve closed
5/6/2011	11:38:02 AM	SiCl4 pre valve closed
5/6/2011	11:38:02 AM	SiCl4 post valve closed
5/6/2011	11:38:02 AM	Bubbler valve closed
5/6/2011	11:38:02 AM	Helium valve opened
5/6/2011	11:38:02 AM	Main Vac valve opened
5/6/2011	11:38:02 AM	Bypass valve opened
5/6/2011	11:38:02 AM	Helium MFC set to  100.000000
5/6/2011	11:38:02 AM	H2 MFC set to  0.000000
5/6/2011	11:38:02 AM	BCl3 MFC set to  0.000000
5/6/2011	11:38:02 AM	PHl3 MFC set to  0.000000
5/6/2011	11:38:02 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:38:02 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:38:03 AM	Tube furnace set to 0
5/6/2011	11:39:03 AM	Helium valve closed
5/6/2011	11:39:03 AM	H2 valve closed
5/6/2011	11:39:03 AM	BCl3 valve closed
5/6/2011	11:39:03 AM	PH3 valve closed
5/6/2011	11:39:03 AM	SiCl4 pre valve closed
5/6/2011	11:39:03 AM	SiCl4 post valve closed
5/6/2011	11:39:03 AM	Bubbler valve closed
5/6/2011	11:39:03 AM	Main Vac valve opened
5/6/2011	11:39:03 AM	Bypass valve opened
5/6/2011	11:39:03 AM	Helium MFC set to  0.000000
5/6/2011	11:39:03 AM	H2 MFC set to  0.000000
5/6/2011	11:39:03 AM	BCl3 MFC set to  0.000000
5/6/2011	11:39:03 AM	PHl3 MFC set to  0.000000
5/6/2011	11:39:03 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:39:03 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:39:03 AM	Tube furnace set to 0
5/6/2011	11:40:03 AM	H2 valve closed
5/6/2011	11:40:03 AM	BCl3 valve closed
5/6/2011	11:40:03 AM	PH3 valve closed
5/6/2011	11:40:03 AM	SiCl4 pre valve closed
5/6/2011	11:40:03 AM	SiCl4 post valve closed
5/6/2011	11:40:03 AM	Bubbler valve closed
5/6/2011	11:40:03 AM	Helium valve opened
5/6/2011	11:40:03 AM	Main Vac valve opened
5/6/2011	11:40:03 AM	Bypass valve opened
5/6/2011	11:40:03 AM	Helium MFC set to  100.000000
5/6/2011	11:40:03 AM	H2 MFC set to  0.000000
5/6/2011	11:40:03 AM	BCl3 MFC set to  0.000000
5/6/2011	11:40:03 AM	PHl3 MFC set to  0.000000
5/6/2011	11:40:03 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:40:03 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:40:03 AM	Tube furnace set to 0
5/6/2011	11:41:03 AM	Helium valve closed
5/6/2011	11:41:03 AM	H2 valve closed
5/6/2011	11:41:03 AM	BCl3 valve closed
5/6/2011	11:41:03 AM	PH3 valve closed
5/6/2011	11:41:03 AM	SiCl4 pre valve closed
5/6/2011	11:41:03 AM	SiCl4 post valve closed
5/6/2011	11:41:03 AM	Bubbler valve closed
5/6/2011	11:41:03 AM	Main Vac valve opened
5/6/2011	11:41:03 AM	Bypass valve opened
5/6/2011	11:41:03 AM	Helium MFC set to  0.000000
5/6/2011	11:41:03 AM	H2 MFC set to  0.000000
5/6/2011	11:41:03 AM	BCl3 MFC set to  0.000000
5/6/2011	11:41:03 AM	PHl3 MFC set to  0.000000
5/6/2011	11:41:03 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:41:03 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:41:03 AM	Tube furnace set to 0
5/6/2011	11:42:03 AM	H2 valve closed
5/6/2011	11:42:03 AM	BCl3 valve closed
5/6/2011	11:42:03 AM	PH3 valve closed
5/6/2011	11:42:03 AM	SiCl4 pre valve closed
5/6/2011	11:42:03 AM	SiCl4 post valve closed
5/6/2011	11:42:03 AM	Bubbler valve closed
5/6/2011	11:42:03 AM	Helium valve opened
5/6/2011	11:42:03 AM	Main Vac valve opened
5/6/2011	11:42:03 AM	Bypass valve opened
5/6/2011	11:42:03 AM	Helium MFC set to  100.000000
5/6/2011	11:42:03 AM	H2 MFC set to  0.000000
5/6/2011	11:42:03 AM	BCl3 MFC set to  0.000000
5/6/2011	11:42:03 AM	PHl3 MFC set to  0.000000
5/6/2011	11:42:03 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:42:03 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:42:03 AM	Tube furnace set to 0
5/6/2011	11:43:03 AM	Helium valve closed
5/6/2011	11:43:03 AM	H2 valve closed
5/6/2011	11:43:03 AM	BCl3 valve closed
5/6/2011	11:43:03 AM	PH3 valve closed
5/6/2011	11:43:03 AM	SiCl4 pre valve closed
5/6/2011	11:43:03 AM	SiCl4 post valve closed
5/6/2011	11:43:03 AM	Bubbler valve closed
5/6/2011	11:43:03 AM	Main Vac valve opened
5/6/2011	11:43:03 AM	Bypass valve opened
5/6/2011	11:43:03 AM	Helium MFC set to  0.000000
5/6/2011	11:43:03 AM	H2 MFC set to  0.000000
5/6/2011	11:43:03 AM	BCl3 MFC set to  0.000000
5/6/2011	11:43:03 AM	PHl3 MFC set to  0.000000
5/6/2011	11:43:03 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:43:03 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:43:04 AM	Tube furnace set to 0
5/6/2011	11:44:04 AM	H2 valve closed
5/6/2011	11:44:04 AM	BCl3 valve closed
5/6/2011	11:44:04 AM	PH3 valve closed
5/6/2011	11:44:04 AM	SiCl4 pre valve closed
5/6/2011	11:44:04 AM	SiCl4 post valve closed
5/6/2011	11:44:04 AM	Bubbler valve closed
5/6/2011	11:44:04 AM	Helium valve opened
5/6/2011	11:44:04 AM	Main Vac valve opened
5/6/2011	11:44:04 AM	Bypass valve opened
5/6/2011	11:44:04 AM	Helium MFC set to  100.000000
5/6/2011	11:44:04 AM	H2 MFC set to  0.000000
5/6/2011	11:44:04 AM	BCl3 MFC set to  0.000000
5/6/2011	11:44:04 AM	PHl3 MFC set to  0.000000
5/6/2011	11:44:04 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:44:04 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:44:04 AM	Tube furnace set to 0
5/6/2011	11:45:04 AM	Helium valve closed
5/6/2011	11:45:04 AM	H2 valve closed
5/6/2011	11:45:04 AM	BCl3 valve closed
5/6/2011	11:45:04 AM	PH3 valve closed
5/6/2011	11:45:04 AM	SiCl4 pre valve closed
5/6/2011	11:45:04 AM	SiCl4 post valve closed
5/6/2011	11:45:04 AM	Bubbler valve closed
5/6/2011	11:45:04 AM	Main Vac valve opened
5/6/2011	11:45:04 AM	Bypass valve opened
5/6/2011	11:45:04 AM	Helium MFC set to  0.000000
5/6/2011	11:45:04 AM	H2 MFC set to  0.000000
5/6/2011	11:45:04 AM	BCl3 MFC set to  0.000000
5/6/2011	11:45:04 AM	PHl3 MFC set to  0.000000
5/6/2011	11:45:04 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:45:04 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:45:04 AM	Tube furnace set to 0
5/6/2011	11:46:04 AM	H2 valve closed
5/6/2011	11:46:04 AM	BCl3 valve closed
5/6/2011	11:46:04 AM	PH3 valve closed
5/6/2011	11:46:04 AM	SiCl4 pre valve closed
5/6/2011	11:46:04 AM	SiCl4 post valve closed
5/6/2011	11:46:04 AM	Bubbler valve closed
5/6/2011	11:46:04 AM	Helium valve opened
5/6/2011	11:46:04 AM	Main Vac valve opened
5/6/2011	11:46:04 AM	Bypass valve opened
5/6/2011	11:46:04 AM	Helium MFC set to  100.000000
5/6/2011	11:46:04 AM	H2 MFC set to  0.000000
5/6/2011	11:46:04 AM	BCl3 MFC set to  0.000000
5/6/2011	11:46:04 AM	PHl3 MFC set to  0.000000
5/6/2011	11:46:04 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:46:04 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:46:04 AM	Tube furnace set to 0
5/6/2011	11:47:04 AM	Helium valve closed
5/6/2011	11:47:04 AM	H2 valve closed
5/6/2011	11:47:04 AM	BCl3 valve closed
5/6/2011	11:47:04 AM	PH3 valve closed
5/6/2011	11:47:04 AM	SiCl4 pre valve closed
5/6/2011	11:47:04 AM	SiCl4 post valve closed
5/6/2011	11:47:04 AM	Bubbler valve closed
5/6/2011	11:47:04 AM	Main Vac valve opened
5/6/2011	11:47:04 AM	Bypass valve opened
5/6/2011	11:47:04 AM	Helium MFC set to  0.000000
5/6/2011	11:47:04 AM	H2 MFC set to  0.000000
5/6/2011	11:47:04 AM	BCl3 MFC set to  0.000000
5/6/2011	11:47:04 AM	PHl3 MFC set to  0.000000
5/6/2011	11:47:04 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:47:04 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:47:04 AM	Tube furnace set to 0
5/6/2011	11:48:04 AM	H2 valve closed
5/6/2011	11:48:04 AM	BCl3 valve closed
5/6/2011	11:48:04 AM	PH3 valve closed
5/6/2011	11:48:04 AM	SiCl4 pre valve closed
5/6/2011	11:48:04 AM	SiCl4 post valve closed
5/6/2011	11:48:04 AM	Bubbler valve closed
5/6/2011	11:48:04 AM	Helium valve opened
5/6/2011	11:48:04 AM	Main Vac valve opened
5/6/2011	11:48:04 AM	Bypass valve opened
5/6/2011	11:48:04 AM	Helium MFC set to  100.000000
5/6/2011	11:48:04 AM	H2 MFC set to  0.000000
5/6/2011	11:48:04 AM	BCl3 MFC set to  0.000000
5/6/2011	11:48:04 AM	PHl3 MFC set to  0.000000
5/6/2011	11:48:04 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:48:04 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:48:05 AM	Tube furnace set to 0
5/6/2011	11:49:05 AM	Helium valve closed
5/6/2011	11:49:05 AM	H2 valve closed
5/6/2011	11:49:05 AM	BCl3 valve closed
5/6/2011	11:49:05 AM	PH3 valve closed
5/6/2011	11:49:05 AM	SiCl4 pre valve closed
5/6/2011	11:49:05 AM	SiCl4 post valve closed
5/6/2011	11:49:05 AM	Bubbler valve closed
5/6/2011	11:49:05 AM	Main Vac valve opened
5/6/2011	11:49:05 AM	Bypass valve opened
5/6/2011	11:49:05 AM	Helium MFC set to  0.000000
5/6/2011	11:49:05 AM	H2 MFC set to  0.000000
5/6/2011	11:49:05 AM	BCl3 MFC set to  0.000000
5/6/2011	11:49:05 AM	PHl3 MFC set to  0.000000
5/6/2011	11:49:05 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:49:05 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:49:05 AM	Tube furnace set to 0
5/6/2011	11:50:05 AM	H2 valve closed
5/6/2011	11:50:05 AM	BCl3 valve closed
5/6/2011	11:50:05 AM	PH3 valve closed
5/6/2011	11:50:05 AM	SiCl4 pre valve closed
5/6/2011	11:50:05 AM	SiCl4 post valve closed
5/6/2011	11:50:05 AM	Bubbler valve closed
5/6/2011	11:50:05 AM	Helium valve opened
5/6/2011	11:50:05 AM	Main Vac valve opened
5/6/2011	11:50:05 AM	Bypass valve opened
5/6/2011	11:50:05 AM	Helium MFC set to  100.000000
5/6/2011	11:50:05 AM	H2 MFC set to  0.000000
5/6/2011	11:50:05 AM	BCl3 MFC set to  0.000000
5/6/2011	11:50:05 AM	PHl3 MFC set to  0.000000
5/6/2011	11:50:05 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:50:05 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:50:05 AM	Tube furnace set to 0
5/6/2011	11:51:05 AM	Helium valve closed
5/6/2011	11:51:05 AM	H2 valve closed
5/6/2011	11:51:05 AM	BCl3 valve closed
5/6/2011	11:51:05 AM	PH3 valve closed
5/6/2011	11:51:05 AM	SiCl4 pre valve closed
5/6/2011	11:51:05 AM	SiCl4 post valve closed
5/6/2011	11:51:05 AM	Bubbler valve closed
5/6/2011	11:51:05 AM	Main Vac valve opened
5/6/2011	11:51:05 AM	Bypass valve opened
5/6/2011	11:51:05 AM	Helium MFC set to  0.000000
5/6/2011	11:51:05 AM	H2 MFC set to  0.000000
5/6/2011	11:51:05 AM	BCl3 MFC set to  0.000000
5/6/2011	11:51:05 AM	PHl3 MFC set to  0.000000
5/6/2011	11:51:05 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:51:05 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:51:05 AM	Tube furnace set to 0
5/6/2011	11:52:05 AM	H2 valve closed
5/6/2011	11:52:05 AM	BCl3 valve closed
5/6/2011	11:52:05 AM	PH3 valve closed
5/6/2011	11:52:05 AM	SiCl4 pre valve closed
5/6/2011	11:52:05 AM	SiCl4 post valve closed
5/6/2011	11:52:05 AM	Bubbler valve closed
5/6/2011	11:52:05 AM	Helium valve opened
5/6/2011	11:52:05 AM	Main Vac valve opened
5/6/2011	11:52:05 AM	Bypass valve opened
5/6/2011	11:52:05 AM	Helium MFC set to  100.000000
5/6/2011	11:52:05 AM	H2 MFC set to  0.000000
5/6/2011	11:52:05 AM	BCl3 MFC set to  0.000000
5/6/2011	11:52:05 AM	PHl3 MFC set to  0.000000
5/6/2011	11:52:05 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:52:05 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:52:05 AM	Tube furnace set to 0
5/6/2011	11:53:05 AM	Helium valve closed
5/6/2011	11:53:05 AM	H2 valve closed
5/6/2011	11:53:05 AM	BCl3 valve closed
5/6/2011	11:53:05 AM	PH3 valve closed
5/6/2011	11:53:05 AM	SiCl4 pre valve closed
5/6/2011	11:53:05 AM	SiCl4 post valve closed
5/6/2011	11:53:05 AM	Bubbler valve closed
5/6/2011	11:53:05 AM	Main Vac valve opened
5/6/2011	11:53:05 AM	Bypass valve opened
5/6/2011	11:53:05 AM	Helium MFC set to  0.000000
5/6/2011	11:53:05 AM	H2 MFC set to  0.000000
5/6/2011	11:53:05 AM	BCl3 MFC set to  0.000000
5/6/2011	11:53:05 AM	PHl3 MFC set to  0.000000
5/6/2011	11:53:05 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:53:05 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:53:06 AM	Tube furnace set to 0
5/6/2011	11:54:06 AM	H2 valve closed
5/6/2011	11:54:06 AM	BCl3 valve closed
5/6/2011	11:54:06 AM	PH3 valve closed
5/6/2011	11:54:06 AM	SiCl4 pre valve closed
5/6/2011	11:54:06 AM	SiCl4 post valve closed
5/6/2011	11:54:06 AM	Bubbler valve closed
5/6/2011	11:54:06 AM	Helium valve opened
5/6/2011	11:54:06 AM	Main Vac valve opened
5/6/2011	11:54:06 AM	Bypass valve opened
5/6/2011	11:54:06 AM	Helium MFC set to  100.000000
5/6/2011	11:54:06 AM	H2 MFC set to  0.000000
5/6/2011	11:54:06 AM	BCl3 MFC set to  0.000000
5/6/2011	11:54:06 AM	PHl3 MFC set to  0.000000
5/6/2011	11:54:06 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:54:06 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:54:06 AM	Tube furnace set to 0
5/6/2011	11:55:06 AM	Helium valve closed
5/6/2011	11:55:06 AM	H2 valve closed
5/6/2011	11:55:06 AM	BCl3 valve closed
5/6/2011	11:55:06 AM	PH3 valve closed
5/6/2011	11:55:06 AM	SiCl4 pre valve closed
5/6/2011	11:55:06 AM	SiCl4 post valve closed
5/6/2011	11:55:06 AM	Bubbler valve closed
5/6/2011	11:55:06 AM	Main Vac valve opened
5/6/2011	11:55:06 AM	Bypass valve opened
5/6/2011	11:55:06 AM	Helium MFC set to  0.000000
5/6/2011	11:55:06 AM	H2 MFC set to  0.000000
5/6/2011	11:55:06 AM	BCl3 MFC set to  0.000000
5/6/2011	11:55:06 AM	PHl3 MFC set to  0.000000
5/6/2011	11:55:06 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:55:06 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:55:06 AM	Tube furnace set to 0
5/6/2011	11:55:07 AM	Run finished at 11:55 AM
5/6/2011	11:55:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	11:57:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/6/2011	11:57:42 AM	Recipe started at 11:57 AM
5/6/2011	11:57:42 AM	Helium valve closed
5/6/2011	11:57:42 AM	H2 valve closed
5/6/2011	11:57:42 AM	BCl3 valve closed
5/6/2011	11:57:42 AM	PH3 valve closed
5/6/2011	11:57:42 AM	SiCl4 pre valve closed
5/6/2011	11:57:42 AM	SiCl4 post valve closed
5/6/2011	11:57:42 AM	Main Vac valve closed
5/6/2011	11:57:42 AM	Bypass valve closed
5/6/2011	11:57:42 AM	Bubbler valve closed
5/6/2011	11:57:42 AM	Helium MFC set to  0.000000
5/6/2011	11:57:42 AM	H2 MFC set to  0.000000
5/6/2011	11:57:42 AM	BCl3 MFC set to  0.000000
5/6/2011	11:57:42 AM	PHl3 MFC set to  0.000000
5/6/2011	11:57:42 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:57:42 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:57:43 AM	Tube furnace set to 0
5/6/2011	11:57:43 AM	Run finished at 11:57 AM
5/6/2011	11:57:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/6/2011	11:57:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	11:57:57 AM	Recipe started at 11:57 AM
5/6/2011	11:57:57 AM	Helium valve closed
5/6/2011	11:57:57 AM	H2 valve closed
5/6/2011	11:57:57 AM	BCl3 valve closed
5/6/2011	11:57:57 AM	PH3 valve closed
5/6/2011	11:57:57 AM	SiCl4 pre valve closed
5/6/2011	11:57:57 AM	SiCl4 post valve closed
5/6/2011	11:57:57 AM	Main Vac valve closed
5/6/2011	11:57:57 AM	Bubbler valve closed
5/6/2011	11:57:57 AM	Bypass valve opened
5/6/2011	11:57:57 AM	Helium MFC set to  0.000000
5/6/2011	11:57:57 AM	H2 MFC set to  0.000000
5/6/2011	11:57:57 AM	BCl3 MFC set to  0.000000
5/6/2011	11:57:57 AM	PHl3 MFC set to  0.000000
5/6/2011	11:57:57 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:57:57 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:57:57 AM	Tube furnace set to 0
5/6/2011	11:57:57 AM	Helium valve closed
5/6/2011	11:57:57 AM	H2 valve closed
5/6/2011	11:57:57 AM	BCl3 valve closed
5/6/2011	11:57:57 AM	PH3 valve closed
5/6/2011	11:57:57 AM	SiCl4 pre valve closed
5/6/2011	11:57:57 AM	SiCl4 post valve closed
5/6/2011	11:57:57 AM	Bubbler valve closed
5/6/2011	11:57:57 AM	Main Vac valve opened
5/6/2011	11:57:57 AM	Bypass valve opened
5/6/2011	11:57:57 AM	Helium MFC set to  0.000000
5/6/2011	11:57:57 AM	H2 MFC set to  0.000000
5/6/2011	11:57:57 AM	BCl3 MFC set to  0.000000
5/6/2011	11:57:57 AM	PHl3 MFC set to  0.000000
5/6/2011	11:57:57 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:57:57 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:57:57 AM	Tube furnace set to 0
5/6/2011	11:57:58 AM	Run finished at 11:57 AM
5/6/2011	11:57:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	11:58:12 AM	Recipe started at 11:58 AM
5/6/2011	11:58:12 AM	Helium valve closed
5/6/2011	11:58:12 AM	BCl3 valve closed
5/6/2011	11:58:12 AM	PH3 valve closed
5/6/2011	11:58:12 AM	SiCl4 pre valve closed
5/6/2011	11:58:12 AM	SiCl4 post valve closed
5/6/2011	11:58:12 AM	Main Vac valve closed
5/6/2011	11:58:12 AM	Bypass valve closed
5/6/2011	11:58:12 AM	Bubbler valve closed
5/6/2011	11:58:12 AM	H2 valve opened
5/6/2011	11:58:12 AM	Helium MFC set to  0.000000
5/6/2011	11:58:12 AM	H2 MFC set to  500.000000
5/6/2011	11:58:12 AM	BCl3 MFC set to  0.000000
5/6/2011	11:58:12 AM	PHl3 MFC set to  0.000000
5/6/2011	11:58:12 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:58:12 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:58:12 AM	Tube furnace set to 0
5/6/2011	11:59:35 AM	Helium valve closed
5/6/2011	11:59:35 AM	BCl3 valve closed
5/6/2011	11:59:35 AM	PH3 valve closed
5/6/2011	11:59:35 AM	SiCl4 pre valve closed
5/6/2011	11:59:35 AM	SiCl4 post valve closed
5/6/2011	11:59:35 AM	Main Vac valve closed
5/6/2011	11:59:35 AM	Bypass valve closed
5/6/2011	11:59:35 AM	H2 valve opened
5/6/2011	11:59:35 AM	Bubbler valve opened
5/6/2011	11:59:35 AM	Helium MFC set to  0.000000
5/6/2011	11:59:35 AM	H2 MFC set to  500.000000
5/6/2011	11:59:35 AM	BCl3 MFC set to  0.000000
5/6/2011	11:59:35 AM	PHl3 MFC set to  0.000000
5/6/2011	11:59:35 AM	SiCl4 MFC set to  0.000000
5/6/2011	11:59:35 AM	Bypass solenoid MFC set to  0.000000
5/6/2011	11:59:35 AM	Tube furnace set to 1000
5/6/2011	12:19:35 PM	Helium valve closed
5/6/2011	12:19:35 PM	PH3 valve closed
5/6/2011	12:19:35 PM	Main Vac valve closed
5/6/2011	12:19:35 PM	Bypass valve closed
5/6/2011	12:19:35 PM	H2 valve opened
5/6/2011	12:19:35 PM	BCl3 valve opened
5/6/2011	12:19:35 PM	SiCl4 pre valve opened
5/6/2011	12:19:35 PM	SiCl4 post valve opened
5/6/2011	12:19:35 PM	Bubbler valve opened
5/6/2011	12:19:35 PM	Helium MFC set to  0.000000
5/6/2011	12:19:35 PM	H2 MFC set to  500.000000
5/6/2011	12:19:35 PM	BCl3 MFC set to  7.000000
5/6/2011	12:19:35 PM	PHl3 MFC set to  0.000000
5/6/2011	12:19:35 PM	SiCl4 MFC set to  75.000000
5/6/2011	12:19:35 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	12:19:35 PM	Tube furnace set to 1000
5/6/2011	12:29:35 PM	H2 valve closed
5/6/2011	12:29:35 PM	BCl3 valve closed
5/6/2011	12:29:35 PM	PH3 valve closed
5/6/2011	12:29:35 PM	SiCl4 pre valve closed
5/6/2011	12:29:35 PM	SiCl4 post valve closed
5/6/2011	12:29:35 PM	Main Vac valve closed
5/6/2011	12:29:35 PM	Bypass valve closed
5/6/2011	12:29:35 PM	Helium valve opened
5/6/2011	12:29:35 PM	Bubbler valve opened
5/6/2011	12:29:35 PM	Helium MFC set to  500.000000
5/6/2011	12:29:35 PM	H2 MFC set to  0.000000
5/6/2011	12:29:35 PM	BCl3 MFC set to  0.000000
5/6/2011	12:29:35 PM	PHl3 MFC set to  0.000000
5/6/2011	12:29:35 PM	SiCl4 MFC set to  0.000000
5/6/2011	12:29:35 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	12:29:35 PM	Tube furnace set to 0
5/6/2011	12:49:35 PM	Helium valve closed
5/6/2011	12:49:35 PM	H2 valve closed
5/6/2011	12:49:35 PM	BCl3 valve closed
5/6/2011	12:49:35 PM	PH3 valve closed
5/6/2011	12:49:35 PM	SiCl4 pre valve closed
5/6/2011	12:49:35 PM	SiCl4 post valve closed
5/6/2011	12:49:35 PM	Main Vac valve closed
5/6/2011	12:49:35 PM	Bypass valve closed
5/6/2011	12:49:35 PM	Bubbler valve closed
5/6/2011	12:49:35 PM	Helium MFC set to  0.000000
5/6/2011	12:49:35 PM	H2 MFC set to  0.000000
5/6/2011	12:49:35 PM	BCl3 MFC set to  0.000000
5/6/2011	12:49:35 PM	PHl3 MFC set to  0.000000
5/6/2011	12:49:35 PM	SiCl4 MFC set to  0.000000
5/6/2011	12:49:35 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	12:49:35 PM	Tube furnace set to 0
5/6/2011	12:49:36 PM	Run finished at 12:49 PM
5/6/2011	12:51:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	12:51:24 PM	Recipe started at 12:51 PM
5/6/2011	12:51:24 PM	Helium valve closed
5/6/2011	12:51:24 PM	H2 valve closed
5/6/2011	12:51:24 PM	BCl3 valve closed
5/6/2011	12:51:24 PM	PH3 valve closed
5/6/2011	12:51:24 PM	SiCl4 pre valve closed
5/6/2011	12:51:24 PM	SiCl4 post valve closed
5/6/2011	12:51:24 PM	Main Vac valve closed
5/6/2011	12:51:24 PM	Bubbler valve closed
5/6/2011	12:51:24 PM	Bypass valve opened
5/6/2011	12:51:24 PM	Helium MFC set to  0.000000
5/6/2011	12:51:24 PM	H2 MFC set to  0.000000
5/6/2011	12:51:24 PM	BCl3 MFC set to  0.000000
5/6/2011	12:51:24 PM	PHl3 MFC set to  0.000000
5/6/2011	12:51:24 PM	SiCl4 MFC set to  0.000000
5/6/2011	12:51:24 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	12:51:24 PM	Tube furnace set to 0
5/6/2011	12:51:47 PM	Helium valve closed
5/6/2011	12:51:47 PM	H2 valve closed
5/6/2011	12:51:47 PM	BCl3 valve closed
5/6/2011	12:51:47 PM	PH3 valve closed
5/6/2011	12:51:47 PM	SiCl4 pre valve closed
5/6/2011	12:51:47 PM	SiCl4 post valve closed
5/6/2011	12:51:47 PM	Bubbler valve closed
5/6/2011	12:51:47 PM	Main Vac valve opened
5/6/2011	12:51:47 PM	Bypass valve opened
5/6/2011	12:51:47 PM	Helium MFC set to  0.000000
5/6/2011	12:51:47 PM	H2 MFC set to  0.000000
5/6/2011	12:51:47 PM	BCl3 MFC set to  0.000000
5/6/2011	12:51:47 PM	PHl3 MFC set to  0.000000
5/6/2011	12:51:47 PM	SiCl4 MFC set to  0.000000
5/6/2011	12:51:47 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	12:51:47 PM	Tube furnace set to 0
5/6/2011	12:51:48 PM	Run finished at 12:51 PM
5/6/2011	12:51:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	12:51:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2011	12:51:49 PM	Recipe started at 12:51 PM
5/6/2011	12:51:49 PM	H2 valve closed
5/6/2011	12:51:49 PM	BCl3 valve closed
5/6/2011	12:51:49 PM	PH3 valve closed
5/6/2011	12:51:49 PM	SiCl4 pre valve closed
5/6/2011	12:51:49 PM	SiCl4 post valve closed
5/6/2011	12:51:49 PM	Main Vac valve closed
5/6/2011	12:51:49 PM	Bypass valve closed
5/6/2011	12:51:49 PM	Bubbler valve closed
5/6/2011	12:51:49 PM	Helium valve opened
5/6/2011	12:51:49 PM	Helium MFC set to  500.000000
5/6/2011	12:51:49 PM	H2 MFC set to  0.000000
5/6/2011	12:51:49 PM	BCl3 MFC set to  0.000000
5/6/2011	12:51:49 PM	PHl3 MFC set to  0.000000
5/6/2011	12:51:49 PM	SiCl4 MFC set to  0.000000
5/6/2011	12:51:49 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	12:51:49 PM	Tube furnace set to 0
5/6/2011	12:53:02 PM	Helium valve closed
5/6/2011	12:53:02 PM	H2 valve closed
5/6/2011	12:53:02 PM	BCl3 valve closed
5/6/2011	12:53:02 PM	PH3 valve closed
5/6/2011	12:53:02 PM	SiCl4 pre valve closed
5/6/2011	12:53:02 PM	SiCl4 post valve closed
5/6/2011	12:53:02 PM	Main Vac valve closed
5/6/2011	12:53:02 PM	Bypass valve closed
5/6/2011	12:53:02 PM	Bubbler valve closed
5/6/2011	12:53:02 PM	Helium MFC set to  0.000000
5/6/2011	12:53:02 PM	H2 MFC set to  0.000000
5/6/2011	12:53:02 PM	BCl3 MFC set to  0.000000
5/6/2011	12:53:02 PM	PHl3 MFC set to  0.000000
5/6/2011	12:53:02 PM	SiCl4 MFC set to  0.000000
5/6/2011	12:53:02 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	12:53:02 PM	Tube furnace set to 0
5/6/2011	12:53:03 PM	Run finished at 12:53 PM
5/6/2011	12:53:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2011	12:54:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	12:54:28 PM	Recipe started at 12:54 PM
5/6/2011	12:54:28 PM	Helium valve closed
5/6/2011	12:54:28 PM	H2 valve closed
5/6/2011	12:54:28 PM	BCl3 valve closed
5/6/2011	12:54:28 PM	PH3 valve closed
5/6/2011	12:54:28 PM	SiCl4 pre valve closed
5/6/2011	12:54:28 PM	SiCl4 post valve closed
5/6/2011	12:54:28 PM	Main Vac valve closed
5/6/2011	12:54:28 PM	Bubbler valve closed
5/6/2011	12:54:28 PM	Bypass valve opened
5/6/2011	12:54:28 PM	Helium MFC set to  0.000000
5/6/2011	12:54:28 PM	H2 MFC set to  0.000000
5/6/2011	12:54:28 PM	BCl3 MFC set to  0.000000
5/6/2011	12:54:28 PM	PHl3 MFC set to  0.000000
5/6/2011	12:54:28 PM	SiCl4 MFC set to  0.000000
5/6/2011	12:54:28 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	12:54:28 PM	Tube furnace set to 0
5/6/2011	12:54:50 PM	Helium valve closed
5/6/2011	12:54:50 PM	H2 valve closed
5/6/2011	12:54:50 PM	BCl3 valve closed
5/6/2011	12:54:50 PM	PH3 valve closed
5/6/2011	12:54:50 PM	SiCl4 pre valve closed
5/6/2011	12:54:50 PM	SiCl4 post valve closed
5/6/2011	12:54:50 PM	Bubbler valve closed
5/6/2011	12:54:50 PM	Main Vac valve opened
5/6/2011	12:54:50 PM	Bypass valve opened
5/6/2011	12:54:50 PM	Helium MFC set to  0.000000
5/6/2011	12:54:50 PM	H2 MFC set to  0.000000
5/6/2011	12:54:50 PM	BCl3 MFC set to  0.000000
5/6/2011	12:54:50 PM	PHl3 MFC set to  0.000000
5/6/2011	12:54:50 PM	SiCl4 MFC set to  0.000000
5/6/2011	12:54:50 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	12:54:50 PM	Tube furnace set to 0
5/6/2011	12:54:51 PM	Run finished at 12:54 PM
5/6/2011	12:54:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	12:54:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2011	12:55:00 PM	Recipe started at 12:55 PM
5/6/2011	12:55:00 PM	H2 valve closed
5/6/2011	12:55:00 PM	BCl3 valve closed
5/6/2011	12:55:00 PM	PH3 valve closed
5/6/2011	12:55:00 PM	SiCl4 pre valve closed
5/6/2011	12:55:00 PM	SiCl4 post valve closed
5/6/2011	12:55:00 PM	Main Vac valve closed
5/6/2011	12:55:00 PM	Bypass valve closed
5/6/2011	12:55:00 PM	Bubbler valve closed
5/6/2011	12:55:00 PM	Helium valve opened
5/6/2011	12:55:00 PM	Helium MFC set to  500.000000
5/6/2011	12:55:00 PM	H2 MFC set to  0.000000
5/6/2011	12:55:00 PM	BCl3 MFC set to  0.000000
5/6/2011	12:55:00 PM	PHl3 MFC set to  0.000000
5/6/2011	12:55:00 PM	SiCl4 MFC set to  0.000000
5/6/2011	12:55:00 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	12:55:00 PM	Tube furnace set to 0
5/6/2011	12:56:15 PM	Helium valve closed
5/6/2011	12:56:15 PM	H2 valve closed
5/6/2011	12:56:15 PM	BCl3 valve closed
5/6/2011	12:56:15 PM	PH3 valve closed
5/6/2011	12:56:15 PM	SiCl4 pre valve closed
5/6/2011	12:56:15 PM	SiCl4 post valve closed
5/6/2011	12:56:15 PM	Main Vac valve closed
5/6/2011	12:56:15 PM	Bypass valve closed
5/6/2011	12:56:15 PM	Bubbler valve closed
5/6/2011	12:56:15 PM	Helium MFC set to  0.000000
5/6/2011	12:56:15 PM	H2 MFC set to  0.000000
5/6/2011	12:56:15 PM	BCl3 MFC set to  0.000000
5/6/2011	12:56:15 PM	PHl3 MFC set to  0.000000
5/6/2011	12:56:15 PM	SiCl4 MFC set to  0.000000
5/6/2011	12:56:15 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	12:56:15 PM	Tube furnace set to 0
5/6/2011	12:56:16 PM	Run finished at 12:56 PM
5/6/2011	12:56:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/6/2011	1:05:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	1:05:41 PM	Recipe started at 1:05 PM
5/6/2011	1:05:41 PM	Helium valve closed
5/6/2011	1:05:41 PM	H2 valve closed
5/6/2011	1:05:41 PM	BCl3 valve closed
5/6/2011	1:05:41 PM	PH3 valve closed
5/6/2011	1:05:41 PM	SiCl4 pre valve closed
5/6/2011	1:05:41 PM	SiCl4 post valve closed
5/6/2011	1:05:41 PM	Main Vac valve closed
5/6/2011	1:05:41 PM	Bubbler valve closed
5/6/2011	1:05:41 PM	Bypass valve opened
5/6/2011	1:05:41 PM	Helium MFC set to  0.000000
5/6/2011	1:05:41 PM	H2 MFC set to  0.000000
5/6/2011	1:05:41 PM	BCl3 MFC set to  0.000000
5/6/2011	1:05:41 PM	PHl3 MFC set to  0.000000
5/6/2011	1:05:41 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:05:41 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:05:41 PM	Tube furnace set to 0
5/6/2011	1:06:13 PM	Helium valve closed
5/6/2011	1:06:13 PM	H2 valve closed
5/6/2011	1:06:13 PM	BCl3 valve closed
5/6/2011	1:06:13 PM	PH3 valve closed
5/6/2011	1:06:13 PM	SiCl4 pre valve closed
5/6/2011	1:06:13 PM	SiCl4 post valve closed
5/6/2011	1:06:13 PM	Bubbler valve closed
5/6/2011	1:06:13 PM	Main Vac valve opened
5/6/2011	1:06:13 PM	Bypass valve opened
5/6/2011	1:06:13 PM	Helium MFC set to  0.000000
5/6/2011	1:06:13 PM	H2 MFC set to  0.000000
5/6/2011	1:06:13 PM	BCl3 MFC set to  0.000000
5/6/2011	1:06:13 PM	PHl3 MFC set to  0.000000
5/6/2011	1:06:13 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:06:13 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:06:13 PM	Tube furnace set to 0
5/6/2011	1:06:13 PM	Run finished at 1:06 PM
5/6/2011	1:06:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	1:51:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	1:51:31 PM	Recipe started at 1:51 PM
5/6/2011	1:51:31 PM	Helium valve closed
5/6/2011	1:51:31 PM	H2 valve closed
5/6/2011	1:51:31 PM	BCl3 valve closed
5/6/2011	1:51:31 PM	PH3 valve closed
5/6/2011	1:51:31 PM	SiCl4 pre valve closed
5/6/2011	1:51:31 PM	SiCl4 post valve closed
5/6/2011	1:51:31 PM	Main Vac valve closed
5/6/2011	1:51:31 PM	Bubbler valve closed
5/6/2011	1:51:31 PM	Bypass valve opened
5/6/2011	1:51:31 PM	Helium MFC set to  0.000000
5/6/2011	1:51:31 PM	H2 MFC set to  0.000000
5/6/2011	1:51:31 PM	BCl3 MFC set to  0.000000
5/6/2011	1:51:31 PM	PHl3 MFC set to  0.000000
5/6/2011	1:51:31 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:51:31 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:51:31 PM	Tube furnace set to 0
5/6/2011	1:51:31 PM	Helium valve closed
5/6/2011	1:51:31 PM	H2 valve closed
5/6/2011	1:51:31 PM	BCl3 valve closed
5/6/2011	1:51:31 PM	PH3 valve closed
5/6/2011	1:51:31 PM	SiCl4 pre valve closed
5/6/2011	1:51:31 PM	SiCl4 post valve closed
5/6/2011	1:51:31 PM	Bubbler valve closed
5/6/2011	1:51:31 PM	Main Vac valve opened
5/6/2011	1:51:31 PM	Bypass valve opened
5/6/2011	1:51:31 PM	Helium MFC set to  0.000000
5/6/2011	1:51:31 PM	H2 MFC set to  0.000000
5/6/2011	1:51:31 PM	BCl3 MFC set to  0.000000
5/6/2011	1:51:31 PM	PHl3 MFC set to  0.000000
5/6/2011	1:51:31 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:51:31 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:51:31 PM	Tube furnace set to 0
5/6/2011	1:52:31 PM	H2 valve closed
5/6/2011	1:52:31 PM	BCl3 valve closed
5/6/2011	1:52:31 PM	PH3 valve closed
5/6/2011	1:52:31 PM	SiCl4 pre valve closed
5/6/2011	1:52:31 PM	SiCl4 post valve closed
5/6/2011	1:52:31 PM	Bubbler valve closed
5/6/2011	1:52:31 PM	Helium valve opened
5/6/2011	1:52:31 PM	Main Vac valve opened
5/6/2011	1:52:31 PM	Bypass valve opened
5/6/2011	1:52:31 PM	Helium MFC set to  100.000000
5/6/2011	1:52:31 PM	H2 MFC set to  0.000000
5/6/2011	1:52:31 PM	BCl3 MFC set to  0.000000
5/6/2011	1:52:31 PM	PHl3 MFC set to  0.000000
5/6/2011	1:52:31 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:52:31 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:52:31 PM	Tube furnace set to 0
5/6/2011	1:53:31 PM	Helium valve closed
5/6/2011	1:53:31 PM	H2 valve closed
5/6/2011	1:53:31 PM	BCl3 valve closed
5/6/2011	1:53:31 PM	PH3 valve closed
5/6/2011	1:53:31 PM	SiCl4 pre valve closed
5/6/2011	1:53:31 PM	SiCl4 post valve closed
5/6/2011	1:53:31 PM	Bubbler valve closed
5/6/2011	1:53:31 PM	Main Vac valve opened
5/6/2011	1:53:32 PM	Bypass valve opened
5/6/2011	1:53:32 PM	Helium MFC set to  0.000000
5/6/2011	1:53:32 PM	H2 MFC set to  0.000000
5/6/2011	1:53:32 PM	BCl3 MFC set to  0.000000
5/6/2011	1:53:32 PM	PHl3 MFC set to  0.000000
5/6/2011	1:53:32 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:53:32 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:53:32 PM	Tube furnace set to 0
5/6/2011	1:54:32 PM	H2 valve closed
5/6/2011	1:54:32 PM	BCl3 valve closed
5/6/2011	1:54:32 PM	PH3 valve closed
5/6/2011	1:54:32 PM	SiCl4 pre valve closed
5/6/2011	1:54:32 PM	SiCl4 post valve closed
5/6/2011	1:54:32 PM	Bubbler valve closed
5/6/2011	1:54:32 PM	Helium valve opened
5/6/2011	1:54:32 PM	Main Vac valve opened
5/6/2011	1:54:32 PM	Bypass valve opened
5/6/2011	1:54:32 PM	Helium MFC set to  100.000000
5/6/2011	1:54:32 PM	H2 MFC set to  0.000000
5/6/2011	1:54:32 PM	BCl3 MFC set to  0.000000
5/6/2011	1:54:32 PM	PHl3 MFC set to  0.000000
5/6/2011	1:54:32 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:54:32 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:54:32 PM	Tube furnace set to 0
5/6/2011	1:55:32 PM	Helium valve closed
5/6/2011	1:55:32 PM	H2 valve closed
5/6/2011	1:55:32 PM	BCl3 valve closed
5/6/2011	1:55:32 PM	PH3 valve closed
5/6/2011	1:55:32 PM	SiCl4 pre valve closed
5/6/2011	1:55:32 PM	SiCl4 post valve closed
5/6/2011	1:55:32 PM	Bubbler valve closed
5/6/2011	1:55:32 PM	Main Vac valve opened
5/6/2011	1:55:32 PM	Bypass valve opened
5/6/2011	1:55:32 PM	Helium MFC set to  0.000000
5/6/2011	1:55:32 PM	H2 MFC set to  0.000000
5/6/2011	1:55:32 PM	BCl3 MFC set to  0.000000
5/6/2011	1:55:32 PM	PHl3 MFC set to  0.000000
5/6/2011	1:55:32 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:55:32 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:55:32 PM	Tube furnace set to 0
5/6/2011	1:56:32 PM	H2 valve closed
5/6/2011	1:56:32 PM	BCl3 valve closed
5/6/2011	1:56:32 PM	PH3 valve closed
5/6/2011	1:56:32 PM	SiCl4 pre valve closed
5/6/2011	1:56:32 PM	SiCl4 post valve closed
5/6/2011	1:56:32 PM	Bubbler valve closed
5/6/2011	1:56:32 PM	Helium valve opened
5/6/2011	1:56:32 PM	Main Vac valve opened
5/6/2011	1:56:32 PM	Bypass valve opened
5/6/2011	1:56:32 PM	Helium MFC set to  100.000000
5/6/2011	1:56:32 PM	H2 MFC set to  0.000000
5/6/2011	1:56:32 PM	BCl3 MFC set to  0.000000
5/6/2011	1:56:32 PM	PHl3 MFC set to  0.000000
5/6/2011	1:56:32 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:56:32 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:56:32 PM	Tube furnace set to 0
5/6/2011	1:57:32 PM	Helium valve closed
5/6/2011	1:57:32 PM	H2 valve closed
5/6/2011	1:57:32 PM	BCl3 valve closed
5/6/2011	1:57:32 PM	PH3 valve closed
5/6/2011	1:57:32 PM	SiCl4 pre valve closed
5/6/2011	1:57:32 PM	SiCl4 post valve closed
5/6/2011	1:57:32 PM	Bubbler valve closed
5/6/2011	1:57:32 PM	Main Vac valve opened
5/6/2011	1:57:32 PM	Bypass valve opened
5/6/2011	1:57:32 PM	Helium MFC set to  0.000000
5/6/2011	1:57:32 PM	H2 MFC set to  0.000000
5/6/2011	1:57:32 PM	BCl3 MFC set to  0.000000
5/6/2011	1:57:32 PM	PHl3 MFC set to  0.000000
5/6/2011	1:57:32 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:57:32 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:57:32 PM	Tube furnace set to 0
5/6/2011	1:58:32 PM	H2 valve closed
5/6/2011	1:58:32 PM	BCl3 valve closed
5/6/2011	1:58:32 PM	PH3 valve closed
5/6/2011	1:58:33 PM	SiCl4 pre valve closed
5/6/2011	1:58:33 PM	SiCl4 post valve closed
5/6/2011	1:58:33 PM	Bubbler valve closed
5/6/2011	1:58:33 PM	Helium valve opened
5/6/2011	1:58:33 PM	Main Vac valve opened
5/6/2011	1:58:33 PM	Bypass valve opened
5/6/2011	1:58:33 PM	Helium MFC set to  100.000000
5/6/2011	1:58:33 PM	H2 MFC set to  0.000000
5/6/2011	1:58:33 PM	BCl3 MFC set to  0.000000
5/6/2011	1:58:33 PM	PHl3 MFC set to  0.000000
5/6/2011	1:58:33 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:58:33 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:58:33 PM	Tube furnace set to 0
5/6/2011	1:59:33 PM	Helium valve closed
5/6/2011	1:59:33 PM	H2 valve closed
5/6/2011	1:59:33 PM	BCl3 valve closed
5/6/2011	1:59:33 PM	PH3 valve closed
5/6/2011	1:59:33 PM	SiCl4 pre valve closed
5/6/2011	1:59:33 PM	SiCl4 post valve closed
5/6/2011	1:59:33 PM	Bubbler valve closed
5/6/2011	1:59:33 PM	Main Vac valve opened
5/6/2011	1:59:33 PM	Bypass valve opened
5/6/2011	1:59:33 PM	Helium MFC set to  0.000000
5/6/2011	1:59:33 PM	H2 MFC set to  0.000000
5/6/2011	1:59:33 PM	BCl3 MFC set to  0.000000
5/6/2011	1:59:33 PM	PHl3 MFC set to  0.000000
5/6/2011	1:59:33 PM	SiCl4 MFC set to  0.000000
5/6/2011	1:59:33 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	1:59:33 PM	Tube furnace set to 0
5/6/2011	2:00:33 PM	H2 valve closed
5/6/2011	2:00:33 PM	BCl3 valve closed
5/6/2011	2:00:33 PM	PH3 valve closed
5/6/2011	2:00:33 PM	SiCl4 pre valve closed
5/6/2011	2:00:33 PM	SiCl4 post valve closed
5/6/2011	2:00:33 PM	Bubbler valve closed
5/6/2011	2:00:33 PM	Helium valve opened
5/6/2011	2:00:33 PM	Main Vac valve opened
5/6/2011	2:00:33 PM	Bypass valve opened
5/6/2011	2:00:33 PM	Helium MFC set to  100.000000
5/6/2011	2:00:33 PM	H2 MFC set to  0.000000
5/6/2011	2:00:33 PM	BCl3 MFC set to  0.000000
5/6/2011	2:00:33 PM	PHl3 MFC set to  0.000000
5/6/2011	2:00:33 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:00:33 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:00:33 PM	Tube furnace set to 0
5/6/2011	2:01:33 PM	Helium valve closed
5/6/2011	2:01:33 PM	H2 valve closed
5/6/2011	2:01:33 PM	BCl3 valve closed
5/6/2011	2:01:33 PM	PH3 valve closed
5/6/2011	2:01:33 PM	SiCl4 pre valve closed
5/6/2011	2:01:33 PM	SiCl4 post valve closed
5/6/2011	2:01:33 PM	Bubbler valve closed
5/6/2011	2:01:33 PM	Main Vac valve opened
5/6/2011	2:01:33 PM	Bypass valve opened
5/6/2011	2:01:33 PM	Helium MFC set to  0.000000
5/6/2011	2:01:33 PM	H2 MFC set to  0.000000
5/6/2011	2:01:33 PM	BCl3 MFC set to  0.000000
5/6/2011	2:01:33 PM	PHl3 MFC set to  0.000000
5/6/2011	2:01:33 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:01:33 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:01:33 PM	Tube furnace set to 0
5/6/2011	2:02:33 PM	H2 valve closed
5/6/2011	2:02:33 PM	BCl3 valve closed
5/6/2011	2:02:33 PM	PH3 valve closed
5/6/2011	2:02:33 PM	SiCl4 pre valve closed
5/6/2011	2:02:33 PM	SiCl4 post valve closed
5/6/2011	2:02:33 PM	Bubbler valve closed
5/6/2011	2:02:33 PM	Helium valve opened
5/6/2011	2:02:33 PM	Main Vac valve opened
5/6/2011	2:02:33 PM	Bypass valve opened
5/6/2011	2:02:33 PM	Helium MFC set to  100.000000
5/6/2011	2:02:33 PM	H2 MFC set to  0.000000
5/6/2011	2:02:33 PM	BCl3 MFC set to  0.000000
5/6/2011	2:02:33 PM	PHl3 MFC set to  0.000000
5/6/2011	2:02:33 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:02:33 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:02:33 PM	Tube furnace set to 0
5/6/2011	2:03:34 PM	Helium valve closed
5/6/2011	2:03:34 PM	H2 valve closed
5/6/2011	2:03:34 PM	BCl3 valve closed
5/6/2011	2:03:34 PM	PH3 valve closed
5/6/2011	2:03:34 PM	SiCl4 pre valve closed
5/6/2011	2:03:34 PM	SiCl4 post valve closed
5/6/2011	2:03:34 PM	Bubbler valve closed
5/6/2011	2:03:34 PM	Main Vac valve opened
5/6/2011	2:03:34 PM	Bypass valve opened
5/6/2011	2:03:34 PM	Helium MFC set to  0.000000
5/6/2011	2:03:34 PM	H2 MFC set to  0.000000
5/6/2011	2:03:34 PM	BCl3 MFC set to  0.000000
5/6/2011	2:03:34 PM	PHl3 MFC set to  0.000000
5/6/2011	2:03:34 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:03:34 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:03:34 PM	Tube furnace set to 0
5/6/2011	2:04:34 PM	H2 valve closed
5/6/2011	2:04:34 PM	BCl3 valve closed
5/6/2011	2:04:34 PM	PH3 valve closed
5/6/2011	2:04:34 PM	SiCl4 pre valve closed
5/6/2011	2:04:34 PM	SiCl4 post valve closed
5/6/2011	2:04:34 PM	Bubbler valve closed
5/6/2011	2:04:34 PM	Helium valve opened
5/6/2011	2:04:34 PM	Main Vac valve opened
5/6/2011	2:04:34 PM	Bypass valve opened
5/6/2011	2:04:34 PM	Helium MFC set to  100.000000
5/6/2011	2:04:34 PM	H2 MFC set to  0.000000
5/6/2011	2:04:34 PM	BCl3 MFC set to  0.000000
5/6/2011	2:04:34 PM	PHl3 MFC set to  0.000000
5/6/2011	2:04:34 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:04:34 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:04:34 PM	Tube furnace set to 0
5/6/2011	2:05:34 PM	Helium valve closed
5/6/2011	2:05:34 PM	H2 valve closed
5/6/2011	2:05:34 PM	BCl3 valve closed
5/6/2011	2:05:34 PM	PH3 valve closed
5/6/2011	2:05:34 PM	SiCl4 pre valve closed
5/6/2011	2:05:34 PM	SiCl4 post valve closed
5/6/2011	2:05:34 PM	Bubbler valve closed
5/6/2011	2:05:34 PM	Main Vac valve opened
5/6/2011	2:05:34 PM	Bypass valve opened
5/6/2011	2:05:34 PM	Helium MFC set to  0.000000
5/6/2011	2:05:34 PM	H2 MFC set to  0.000000
5/6/2011	2:05:34 PM	BCl3 MFC set to  0.000000
5/6/2011	2:05:34 PM	PHl3 MFC set to  0.000000
5/6/2011	2:05:34 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:05:34 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:05:34 PM	Tube furnace set to 0
5/6/2011	2:06:34 PM	H2 valve closed
5/6/2011	2:06:34 PM	BCl3 valve closed
5/6/2011	2:06:34 PM	PH3 valve closed
5/6/2011	2:06:34 PM	SiCl4 pre valve closed
5/6/2011	2:06:34 PM	SiCl4 post valve closed
5/6/2011	2:06:34 PM	Bubbler valve closed
5/6/2011	2:06:34 PM	Helium valve opened
5/6/2011	2:06:34 PM	Main Vac valve opened
5/6/2011	2:06:34 PM	Bypass valve opened
5/6/2011	2:06:34 PM	Helium MFC set to  100.000000
5/6/2011	2:06:34 PM	H2 MFC set to  0.000000
5/6/2011	2:06:34 PM	BCl3 MFC set to  0.000000
5/6/2011	2:06:34 PM	PHl3 MFC set to  0.000000
5/6/2011	2:06:34 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:06:34 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:06:34 PM	Tube furnace set to 0
5/6/2011	2:07:34 PM	Helium valve closed
5/6/2011	2:07:34 PM	H2 valve closed
5/6/2011	2:07:34 PM	BCl3 valve closed
5/6/2011	2:07:34 PM	PH3 valve closed
5/6/2011	2:07:34 PM	SiCl4 pre valve closed
5/6/2011	2:07:34 PM	SiCl4 post valve closed
5/6/2011	2:07:34 PM	Bubbler valve closed
5/6/2011	2:07:34 PM	Main Vac valve opened
5/6/2011	2:07:34 PM	Bypass valve opened
5/6/2011	2:07:34 PM	Helium MFC set to  0.000000
5/6/2011	2:07:34 PM	H2 MFC set to  0.000000
5/6/2011	2:07:34 PM	BCl3 MFC set to  0.000000
5/6/2011	2:07:34 PM	PHl3 MFC set to  0.000000
5/6/2011	2:07:34 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:07:34 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:07:35 PM	Tube furnace set to 0
5/6/2011	2:08:35 PM	H2 valve closed
5/6/2011	2:08:35 PM	BCl3 valve closed
5/6/2011	2:08:35 PM	PH3 valve closed
5/6/2011	2:08:35 PM	SiCl4 pre valve closed
5/6/2011	2:08:35 PM	SiCl4 post valve closed
5/6/2011	2:08:35 PM	Bubbler valve closed
5/6/2011	2:08:35 PM	Helium valve opened
5/6/2011	2:08:35 PM	Main Vac valve opened
5/6/2011	2:08:35 PM	Bypass valve opened
5/6/2011	2:08:35 PM	Helium MFC set to  100.000000
5/6/2011	2:08:35 PM	H2 MFC set to  0.000000
5/6/2011	2:08:35 PM	BCl3 MFC set to  0.000000
5/6/2011	2:08:35 PM	PHl3 MFC set to  0.000000
5/6/2011	2:08:35 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:08:35 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:08:35 PM	Tube furnace set to 0
5/6/2011	2:09:35 PM	Helium valve closed
5/6/2011	2:09:35 PM	H2 valve closed
5/6/2011	2:09:35 PM	BCl3 valve closed
5/6/2011	2:09:35 PM	PH3 valve closed
5/6/2011	2:09:35 PM	SiCl4 pre valve closed
5/6/2011	2:09:35 PM	SiCl4 post valve closed
5/6/2011	2:09:35 PM	Bubbler valve closed
5/6/2011	2:09:35 PM	Main Vac valve opened
5/6/2011	2:09:35 PM	Bypass valve opened
5/6/2011	2:09:35 PM	Helium MFC set to  0.000000
5/6/2011	2:09:35 PM	H2 MFC set to  0.000000
5/6/2011	2:09:35 PM	BCl3 MFC set to  0.000000
5/6/2011	2:09:35 PM	PHl3 MFC set to  0.000000
5/6/2011	2:09:35 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:09:35 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:09:35 PM	Tube furnace set to 0
5/6/2011	2:10:35 PM	H2 valve closed
5/6/2011	2:10:35 PM	BCl3 valve closed
5/6/2011	2:10:35 PM	PH3 valve closed
5/6/2011	2:10:35 PM	SiCl4 pre valve closed
5/6/2011	2:10:35 PM	SiCl4 post valve closed
5/6/2011	2:10:35 PM	Bubbler valve closed
5/6/2011	2:10:35 PM	Helium valve opened
5/6/2011	2:10:35 PM	Main Vac valve opened
5/6/2011	2:10:35 PM	Bypass valve opened
5/6/2011	2:10:35 PM	Helium MFC set to  100.000000
5/6/2011	2:10:35 PM	H2 MFC set to  0.000000
5/6/2011	2:10:35 PM	BCl3 MFC set to  0.000000
5/6/2011	2:10:35 PM	PHl3 MFC set to  0.000000
5/6/2011	2:10:35 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:10:35 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:10:35 PM	Tube furnace set to 0
5/6/2011	2:11:35 PM	Helium valve closed
5/6/2011	2:11:35 PM	H2 valve closed
5/6/2011	2:11:35 PM	BCl3 valve closed
5/6/2011	2:11:35 PM	PH3 valve closed
5/6/2011	2:11:35 PM	SiCl4 pre valve closed
5/6/2011	2:11:35 PM	SiCl4 post valve closed
5/6/2011	2:11:35 PM	Bubbler valve closed
5/6/2011	2:11:35 PM	Main Vac valve opened
5/6/2011	2:11:35 PM	Bypass valve opened
5/6/2011	2:11:35 PM	Helium MFC set to  0.000000
5/6/2011	2:11:35 PM	H2 MFC set to  0.000000
5/6/2011	2:11:35 PM	BCl3 MFC set to  0.000000
5/6/2011	2:11:35 PM	PHl3 MFC set to  0.000000
5/6/2011	2:11:35 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:11:35 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:11:35 PM	Tube furnace set to 0
5/6/2011	2:11:36 PM	Run finished at 2:11 PM
5/6/2011	2:11:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	2:12:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/6/2011	2:12:32 PM	Recipe started at 2:12 PM
5/6/2011	2:12:32 PM	Helium valve closed
5/6/2011	2:12:32 PM	H2 valve closed
5/6/2011	2:12:32 PM	BCl3 valve closed
5/6/2011	2:12:32 PM	PH3 valve closed
5/6/2011	2:12:32 PM	SiCl4 pre valve closed
5/6/2011	2:12:32 PM	SiCl4 post valve closed
5/6/2011	2:12:32 PM	Main Vac valve closed
5/6/2011	2:12:32 PM	Bypass valve closed
5/6/2011	2:12:32 PM	Bubbler valve closed
5/6/2011	2:12:32 PM	Helium MFC set to  0.000000
5/6/2011	2:12:32 PM	H2 MFC set to  0.000000
5/6/2011	2:12:32 PM	BCl3 MFC set to  0.000000
5/6/2011	2:12:32 PM	PHl3 MFC set to  0.000000
5/6/2011	2:12:32 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:12:32 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:12:32 PM	Tube furnace set to 0
5/6/2011	2:12:33 PM	Run finished at 2:12 PM
5/6/2011	2:12:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/6/2011	2:12:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	2:12:48 PM	Recipe started at 2:12 PM
5/6/2011	2:12:48 PM	Helium valve closed
5/6/2011	2:12:48 PM	H2 valve closed
5/6/2011	2:12:48 PM	BCl3 valve closed
5/6/2011	2:12:48 PM	PH3 valve closed
5/6/2011	2:12:48 PM	SiCl4 pre valve closed
5/6/2011	2:12:48 PM	SiCl4 post valve closed
5/6/2011	2:12:48 PM	Main Vac valve closed
5/6/2011	2:12:48 PM	Bubbler valve closed
5/6/2011	2:12:48 PM	Bypass valve opened
5/6/2011	2:12:48 PM	Helium MFC set to  0.000000
5/6/2011	2:12:48 PM	H2 MFC set to  0.000000
5/6/2011	2:12:48 PM	BCl3 MFC set to  0.000000
5/6/2011	2:12:48 PM	PHl3 MFC set to  0.000000
5/6/2011	2:12:48 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:12:48 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:12:48 PM	Tube furnace set to 0
5/6/2011	2:12:49 PM	Helium valve closed
5/6/2011	2:12:49 PM	H2 valve closed
5/6/2011	2:12:49 PM	BCl3 valve closed
5/6/2011	2:12:49 PM	PH3 valve closed
5/6/2011	2:12:49 PM	SiCl4 pre valve closed
5/6/2011	2:12:49 PM	SiCl4 post valve closed
5/6/2011	2:12:49 PM	Bubbler valve closed
5/6/2011	2:12:49 PM	Main Vac valve opened
5/6/2011	2:12:49 PM	Bypass valve opened
5/6/2011	2:12:49 PM	Helium MFC set to  0.000000
5/6/2011	2:12:49 PM	H2 MFC set to  0.000000
5/6/2011	2:12:49 PM	BCl3 MFC set to  0.000000
5/6/2011	2:12:49 PM	PHl3 MFC set to  0.000000
5/6/2011	2:12:49 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:12:49 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:12:49 PM	Tube furnace set to 0
5/6/2011	2:12:49 PM	Run finished at 2:12 PM
5/6/2011	2:12:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	2:14:25 PM	Recipe started at 2:14 PM
5/6/2011	2:14:25 PM	Helium valve closed
5/6/2011	2:14:25 PM	BCl3 valve closed
5/6/2011	2:14:26 PM	PH3 valve closed
5/6/2011	2:14:26 PM	SiCl4 pre valve closed
5/6/2011	2:14:26 PM	SiCl4 post valve closed
5/6/2011	2:14:26 PM	Main Vac valve closed
5/6/2011	2:14:26 PM	Bypass valve closed
5/6/2011	2:14:26 PM	Bubbler valve closed
5/6/2011	2:14:26 PM	H2 valve opened
5/6/2011	2:14:26 PM	Helium MFC set to  0.000000
5/6/2011	2:14:26 PM	H2 MFC set to  500.000000
5/6/2011	2:14:26 PM	BCl3 MFC set to  0.000000
5/6/2011	2:14:26 PM	PHl3 MFC set to  0.000000
5/6/2011	2:14:26 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:14:26 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:14:26 PM	Tube furnace set to 0
5/6/2011	2:15:45 PM	Helium valve closed
5/6/2011	2:15:45 PM	BCl3 valve closed
5/6/2011	2:15:45 PM	PH3 valve closed
5/6/2011	2:15:45 PM	SiCl4 pre valve closed
5/6/2011	2:15:45 PM	SiCl4 post valve closed
5/6/2011	2:15:45 PM	Main Vac valve closed
5/6/2011	2:15:45 PM	Bypass valve closed
5/6/2011	2:15:45 PM	H2 valve opened
5/6/2011	2:15:45 PM	Bubbler valve opened
5/6/2011	2:15:45 PM	Helium MFC set to  0.000000
5/6/2011	2:15:45 PM	H2 MFC set to  500.000000
5/6/2011	2:15:45 PM	BCl3 MFC set to  0.000000
5/6/2011	2:15:45 PM	PHl3 MFC set to  0.000000
5/6/2011	2:15:45 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:15:45 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:15:45 PM	Tube furnace set to 1000
5/6/2011	2:35:45 PM	Helium valve closed
5/6/2011	2:35:45 PM	PH3 valve closed
5/6/2011	2:35:45 PM	Main Vac valve closed
5/6/2011	2:35:45 PM	Bypass valve closed
5/6/2011	2:35:45 PM	H2 valve opened
5/6/2011	2:35:45 PM	BCl3 valve opened
5/6/2011	2:35:45 PM	SiCl4 pre valve opened
5/6/2011	2:35:45 PM	SiCl4 post valve opened
5/6/2011	2:35:45 PM	Bubbler valve opened
5/6/2011	2:35:45 PM	Helium MFC set to  0.000000
5/6/2011	2:35:45 PM	H2 MFC set to  500.000000
5/6/2011	2:35:45 PM	BCl3 MFC set to  6.000000
5/6/2011	2:35:45 PM	PHl3 MFC set to  0.000000
5/6/2011	2:35:45 PM	SiCl4 MFC set to  75.000000
5/6/2011	2:35:45 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:35:46 PM	Tube furnace set to 1000
5/6/2011	2:45:46 PM	H2 valve closed
5/6/2011	2:45:46 PM	BCl3 valve closed
5/6/2011	2:45:46 PM	PH3 valve closed
5/6/2011	2:45:46 PM	SiCl4 pre valve closed
5/6/2011	2:45:46 PM	SiCl4 post valve closed
5/6/2011	2:45:46 PM	Main Vac valve closed
5/6/2011	2:45:46 PM	Bypass valve closed
5/6/2011	2:45:46 PM	Helium valve opened
5/6/2011	2:45:46 PM	Bubbler valve opened
5/6/2011	2:45:46 PM	Helium MFC set to  500.000000
5/6/2011	2:45:46 PM	H2 MFC set to  0.000000
5/6/2011	2:45:46 PM	BCl3 MFC set to  0.000000
5/6/2011	2:45:46 PM	PHl3 MFC set to  0.000000
5/6/2011	2:45:46 PM	SiCl4 MFC set to  0.000000
5/6/2011	2:45:46 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	2:45:46 PM	Tube furnace set to 0
5/6/2011	3:05:46 PM	Helium valve closed
5/6/2011	3:05:46 PM	H2 valve closed
5/6/2011	3:05:46 PM	BCl3 valve closed
5/6/2011	3:05:46 PM	PH3 valve closed
5/6/2011	3:05:46 PM	SiCl4 pre valve closed
5/6/2011	3:05:46 PM	SiCl4 post valve closed
5/6/2011	3:05:46 PM	Main Vac valve closed
5/6/2011	3:05:46 PM	Bypass valve closed
5/6/2011	3:05:46 PM	Bubbler valve closed
5/6/2011	3:05:46 PM	Helium MFC set to  0.000000
5/6/2011	3:05:46 PM	H2 MFC set to  0.000000
5/6/2011	3:05:46 PM	BCl3 MFC set to  0.000000
5/6/2011	3:05:46 PM	PHl3 MFC set to  0.000000
5/6/2011	3:05:46 PM	SiCl4 MFC set to  0.000000
5/6/2011	3:05:46 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	3:05:46 PM	Tube furnace set to 0
5/6/2011	3:05:46 PM	Run finished at 3:05 PM
5/6/2011	3:40:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	3:40:24 PM	Recipe started at 3:40 PM
5/6/2011	3:40:24 PM	Helium valve closed
5/6/2011	3:40:24 PM	H2 valve closed
5/6/2011	3:40:24 PM	BCl3 valve closed
5/6/2011	3:40:24 PM	PH3 valve closed
5/6/2011	3:40:24 PM	SiCl4 pre valve closed
5/6/2011	3:40:24 PM	SiCl4 post valve closed
5/6/2011	3:40:24 PM	Main Vac valve closed
5/6/2011	3:40:24 PM	Bubbler valve closed
5/6/2011	3:40:24 PM	Bypass valve opened
5/6/2011	3:40:24 PM	Helium MFC set to  0.000000
5/6/2011	3:40:24 PM	H2 MFC set to  0.000000
5/6/2011	3:40:24 PM	BCl3 MFC set to  0.000000
5/6/2011	3:40:24 PM	PHl3 MFC set to  0.000000
5/6/2011	3:40:24 PM	SiCl4 MFC set to  0.000000
5/6/2011	3:40:24 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	3:40:25 PM	Tube furnace set to 0
5/6/2011	3:40:58 PM	Helium valve closed
5/6/2011	3:40:58 PM	H2 valve closed
5/6/2011	3:40:58 PM	BCl3 valve closed
5/6/2011	3:40:58 PM	PH3 valve closed
5/6/2011	3:40:58 PM	SiCl4 pre valve closed
5/6/2011	3:40:58 PM	SiCl4 post valve closed
5/6/2011	3:40:58 PM	Bubbler valve closed
5/6/2011	3:40:58 PM	Main Vac valve opened
5/6/2011	3:40:58 PM	Bypass valve opened
5/6/2011	3:40:58 PM	Helium MFC set to  0.000000
5/6/2011	3:40:58 PM	H2 MFC set to  0.000000
5/6/2011	3:40:58 PM	BCl3 MFC set to  0.000000
5/6/2011	3:40:58 PM	PHl3 MFC set to  0.000000
5/6/2011	3:40:58 PM	SiCl4 MFC set to  0.000000
5/6/2011	3:40:58 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	3:40:58 PM	Tube furnace set to 0
5/6/2011	3:40:59 PM	Run finished at 3:40 PM
5/6/2011	3:40:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	4:41:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	4:41:40 PM	Recipe started at 4:41 PM
5/6/2011	4:41:40 PM	Helium valve closed
5/6/2011	4:41:40 PM	H2 valve closed
5/6/2011	4:41:40 PM	BCl3 valve closed
5/6/2011	4:41:40 PM	PH3 valve closed
5/6/2011	4:41:40 PM	SiCl4 pre valve closed
5/6/2011	4:41:40 PM	SiCl4 post valve closed
5/6/2011	4:41:40 PM	Main Vac valve closed
5/6/2011	4:41:40 PM	Bubbler valve closed
5/6/2011	4:41:40 PM	Bypass valve opened
5/6/2011	4:41:40 PM	Helium MFC set to  0.000000
5/6/2011	4:41:40 PM	H2 MFC set to  0.000000
5/6/2011	4:41:40 PM	BCl3 MFC set to  0.000000
5/6/2011	4:41:40 PM	PHl3 MFC set to  0.000000
5/6/2011	4:41:40 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:41:40 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:41:41 PM	Tube furnace set to 0
5/6/2011	4:41:41 PM	Helium valve closed
5/6/2011	4:41:41 PM	H2 valve closed
5/6/2011	4:41:41 PM	BCl3 valve closed
5/6/2011	4:41:41 PM	PH3 valve closed
5/6/2011	4:41:41 PM	SiCl4 pre valve closed
5/6/2011	4:41:41 PM	SiCl4 post valve closed
5/6/2011	4:41:41 PM	Bubbler valve closed
5/6/2011	4:41:41 PM	Main Vac valve opened
5/6/2011	4:41:41 PM	Bypass valve opened
5/6/2011	4:41:41 PM	Helium MFC set to  0.000000
5/6/2011	4:41:41 PM	H2 MFC set to  0.000000
5/6/2011	4:41:41 PM	BCl3 MFC set to  0.000000
5/6/2011	4:41:41 PM	PHl3 MFC set to  0.000000
5/6/2011	4:41:41 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:41:41 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:41:41 PM	Tube furnace set to 0
5/6/2011	4:42:41 PM	H2 valve closed
5/6/2011	4:42:41 PM	BCl3 valve closed
5/6/2011	4:42:41 PM	PH3 valve closed
5/6/2011	4:42:41 PM	SiCl4 pre valve closed
5/6/2011	4:42:41 PM	SiCl4 post valve closed
5/6/2011	4:42:41 PM	Bubbler valve closed
5/6/2011	4:42:41 PM	Helium valve opened
5/6/2011	4:42:41 PM	Main Vac valve opened
5/6/2011	4:42:41 PM	Bypass valve opened
5/6/2011	4:42:41 PM	Helium MFC set to  100.000000
5/6/2011	4:42:41 PM	H2 MFC set to  0.000000
5/6/2011	4:42:41 PM	BCl3 MFC set to  0.000000
5/6/2011	4:42:41 PM	PHl3 MFC set to  0.000000
5/6/2011	4:42:41 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:42:41 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:42:41 PM	Tube furnace set to 0
5/6/2011	4:43:41 PM	Helium valve closed
5/6/2011	4:43:41 PM	H2 valve closed
5/6/2011	4:43:41 PM	BCl3 valve closed
5/6/2011	4:43:41 PM	PH3 valve closed
5/6/2011	4:43:41 PM	SiCl4 pre valve closed
5/6/2011	4:43:41 PM	SiCl4 post valve closed
5/6/2011	4:43:41 PM	Bubbler valve closed
5/6/2011	4:43:41 PM	Main Vac valve opened
5/6/2011	4:43:41 PM	Bypass valve opened
5/6/2011	4:43:41 PM	Helium MFC set to  0.000000
5/6/2011	4:43:41 PM	H2 MFC set to  0.000000
5/6/2011	4:43:41 PM	BCl3 MFC set to  0.000000
5/6/2011	4:43:41 PM	PHl3 MFC set to  0.000000
5/6/2011	4:43:41 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:43:41 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:43:41 PM	Tube furnace set to 0
5/6/2011	4:44:41 PM	H2 valve closed
5/6/2011	4:44:41 PM	BCl3 valve closed
5/6/2011	4:44:42 PM	PH3 valve closed
5/6/2011	4:44:42 PM	SiCl4 pre valve closed
5/6/2011	4:44:42 PM	SiCl4 post valve closed
5/6/2011	4:44:42 PM	Bubbler valve closed
5/6/2011	4:44:42 PM	Helium valve opened
5/6/2011	4:44:42 PM	Main Vac valve opened
5/6/2011	4:44:42 PM	Bypass valve opened
5/6/2011	4:44:42 PM	Helium MFC set to  100.000000
5/6/2011	4:44:42 PM	H2 MFC set to  0.000000
5/6/2011	4:44:42 PM	BCl3 MFC set to  0.000000
5/6/2011	4:44:42 PM	PHl3 MFC set to  0.000000
5/6/2011	4:44:42 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:44:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:44:42 PM	Tube furnace set to 0
5/6/2011	4:45:42 PM	Helium valve closed
5/6/2011	4:45:42 PM	H2 valve closed
5/6/2011	4:45:42 PM	BCl3 valve closed
5/6/2011	4:45:42 PM	PH3 valve closed
5/6/2011	4:45:42 PM	SiCl4 pre valve closed
5/6/2011	4:45:42 PM	SiCl4 post valve closed
5/6/2011	4:45:42 PM	Bubbler valve closed
5/6/2011	4:45:42 PM	Main Vac valve opened
5/6/2011	4:45:42 PM	Bypass valve opened
5/6/2011	4:45:42 PM	Helium MFC set to  0.000000
5/6/2011	4:45:42 PM	H2 MFC set to  0.000000
5/6/2011	4:45:42 PM	BCl3 MFC set to  0.000000
5/6/2011	4:45:42 PM	PHl3 MFC set to  0.000000
5/6/2011	4:45:42 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:45:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:45:42 PM	Tube furnace set to 0
5/6/2011	4:46:42 PM	H2 valve closed
5/6/2011	4:46:42 PM	BCl3 valve closed
5/6/2011	4:46:42 PM	PH3 valve closed
5/6/2011	4:46:42 PM	SiCl4 pre valve closed
5/6/2011	4:46:42 PM	SiCl4 post valve closed
5/6/2011	4:46:42 PM	Bubbler valve closed
5/6/2011	4:46:42 PM	Helium valve opened
5/6/2011	4:46:42 PM	Main Vac valve opened
5/6/2011	4:46:42 PM	Bypass valve opened
5/6/2011	4:46:42 PM	Helium MFC set to  100.000000
5/6/2011	4:46:42 PM	H2 MFC set to  0.000000
5/6/2011	4:46:42 PM	BCl3 MFC set to  0.000000
5/6/2011	4:46:42 PM	PHl3 MFC set to  0.000000
5/6/2011	4:46:42 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:46:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:46:42 PM	Tube furnace set to 0
5/6/2011	4:47:42 PM	Helium valve closed
5/6/2011	4:47:42 PM	H2 valve closed
5/6/2011	4:47:42 PM	BCl3 valve closed
5/6/2011	4:47:42 PM	PH3 valve closed
5/6/2011	4:47:42 PM	SiCl4 pre valve closed
5/6/2011	4:47:42 PM	SiCl4 post valve closed
5/6/2011	4:47:42 PM	Bubbler valve closed
5/6/2011	4:47:42 PM	Main Vac valve opened
5/6/2011	4:47:42 PM	Bypass valve opened
5/6/2011	4:47:42 PM	Helium MFC set to  0.000000
5/6/2011	4:47:42 PM	H2 MFC set to  0.000000
5/6/2011	4:47:42 PM	BCl3 MFC set to  0.000000
5/6/2011	4:47:42 PM	PHl3 MFC set to  0.000000
5/6/2011	4:47:42 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:47:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:47:42 PM	Tube furnace set to 0
5/6/2011	4:48:42 PM	H2 valve closed
5/6/2011	4:48:42 PM	BCl3 valve closed
5/6/2011	4:48:42 PM	PH3 valve closed
5/6/2011	4:48:42 PM	SiCl4 pre valve closed
5/6/2011	4:48:42 PM	SiCl4 post valve closed
5/6/2011	4:48:42 PM	Bubbler valve closed
5/6/2011	4:48:42 PM	Helium valve opened
5/6/2011	4:48:42 PM	Main Vac valve opened
5/6/2011	4:48:42 PM	Bypass valve opened
5/6/2011	4:48:42 PM	Helium MFC set to  100.000000
5/6/2011	4:48:42 PM	H2 MFC set to  0.000000
5/6/2011	4:48:42 PM	BCl3 MFC set to  0.000000
5/6/2011	4:48:42 PM	PHl3 MFC set to  0.000000
5/6/2011	4:48:42 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:48:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:48:42 PM	Tube furnace set to 0
5/6/2011	4:49:43 PM	Helium valve closed
5/6/2011	4:49:43 PM	H2 valve closed
5/6/2011	4:49:43 PM	BCl3 valve closed
5/6/2011	4:49:43 PM	PH3 valve closed
5/6/2011	4:49:43 PM	SiCl4 pre valve closed
5/6/2011	4:49:43 PM	SiCl4 post valve closed
5/6/2011	4:49:43 PM	Bubbler valve closed
5/6/2011	4:49:43 PM	Main Vac valve opened
5/6/2011	4:49:43 PM	Bypass valve opened
5/6/2011	4:49:43 PM	Helium MFC set to  0.000000
5/6/2011	4:49:43 PM	H2 MFC set to  0.000000
5/6/2011	4:49:43 PM	BCl3 MFC set to  0.000000
5/6/2011	4:49:43 PM	PHl3 MFC set to  0.000000
5/6/2011	4:49:43 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:49:43 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:49:43 PM	Tube furnace set to 0
5/6/2011	4:50:43 PM	H2 valve closed
5/6/2011	4:50:43 PM	BCl3 valve closed
5/6/2011	4:50:43 PM	PH3 valve closed
5/6/2011	4:50:43 PM	SiCl4 pre valve closed
5/6/2011	4:50:43 PM	SiCl4 post valve closed
5/6/2011	4:50:43 PM	Bubbler valve closed
5/6/2011	4:50:43 PM	Helium valve opened
5/6/2011	4:50:43 PM	Main Vac valve opened
5/6/2011	4:50:43 PM	Bypass valve opened
5/6/2011	4:50:43 PM	Helium MFC set to  100.000000
5/6/2011	4:50:43 PM	H2 MFC set to  0.000000
5/6/2011	4:50:43 PM	BCl3 MFC set to  0.000000
5/6/2011	4:50:43 PM	PHl3 MFC set to  0.000000
5/6/2011	4:50:43 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:50:43 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:50:43 PM	Tube furnace set to 0
5/6/2011	4:51:43 PM	Helium valve closed
5/6/2011	4:51:43 PM	H2 valve closed
5/6/2011	4:51:43 PM	BCl3 valve closed
5/6/2011	4:51:43 PM	PH3 valve closed
5/6/2011	4:51:43 PM	SiCl4 pre valve closed
5/6/2011	4:51:43 PM	SiCl4 post valve closed
5/6/2011	4:51:43 PM	Bubbler valve closed
5/6/2011	4:51:43 PM	Main Vac valve opened
5/6/2011	4:51:43 PM	Bypass valve opened
5/6/2011	4:51:43 PM	Helium MFC set to  0.000000
5/6/2011	4:51:43 PM	H2 MFC set to  0.000000
5/6/2011	4:51:43 PM	BCl3 MFC set to  0.000000
5/6/2011	4:51:43 PM	PHl3 MFC set to  0.000000
5/6/2011	4:51:43 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:51:43 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:51:43 PM	Tube furnace set to 0
5/6/2011	4:52:43 PM	H2 valve closed
5/6/2011	4:52:43 PM	BCl3 valve closed
5/6/2011	4:52:43 PM	PH3 valve closed
5/6/2011	4:52:43 PM	SiCl4 pre valve closed
5/6/2011	4:52:43 PM	SiCl4 post valve closed
5/6/2011	4:52:43 PM	Bubbler valve closed
5/6/2011	4:52:43 PM	Helium valve opened
5/6/2011	4:52:43 PM	Main Vac valve opened
5/6/2011	4:52:43 PM	Bypass valve opened
5/6/2011	4:52:43 PM	Helium MFC set to  100.000000
5/6/2011	4:52:43 PM	H2 MFC set to  0.000000
5/6/2011	4:52:43 PM	BCl3 MFC set to  0.000000
5/6/2011	4:52:43 PM	PHl3 MFC set to  0.000000
5/6/2011	4:52:43 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:52:43 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:52:43 PM	Tube furnace set to 0
5/6/2011	4:53:43 PM	Helium valve closed
5/6/2011	4:53:43 PM	H2 valve closed
5/6/2011	4:53:43 PM	BCl3 valve closed
5/6/2011	4:53:43 PM	PH3 valve closed
5/6/2011	4:53:43 PM	SiCl4 pre valve closed
5/6/2011	4:53:43 PM	SiCl4 post valve closed
5/6/2011	4:53:43 PM	Bubbler valve closed
5/6/2011	4:53:43 PM	Main Vac valve opened
5/6/2011	4:53:43 PM	Bypass valve opened
5/6/2011	4:53:43 PM	Helium MFC set to  0.000000
5/6/2011	4:53:43 PM	H2 MFC set to  0.000000
5/6/2011	4:53:43 PM	BCl3 MFC set to  0.000000
5/6/2011	4:53:43 PM	PHl3 MFC set to  0.000000
5/6/2011	4:53:43 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:53:43 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:53:43 PM	Tube furnace set to 0
5/6/2011	4:54:44 PM	H2 valve closed
5/6/2011	4:54:44 PM	BCl3 valve closed
5/6/2011	4:54:44 PM	PH3 valve closed
5/6/2011	4:54:44 PM	SiCl4 pre valve closed
5/6/2011	4:54:44 PM	SiCl4 post valve closed
5/6/2011	4:54:44 PM	Bubbler valve closed
5/6/2011	4:54:44 PM	Helium valve opened
5/6/2011	4:54:44 PM	Main Vac valve opened
5/6/2011	4:54:44 PM	Bypass valve opened
5/6/2011	4:54:44 PM	Helium MFC set to  100.000000
5/6/2011	4:54:44 PM	H2 MFC set to  0.000000
5/6/2011	4:54:44 PM	BCl3 MFC set to  0.000000
5/6/2011	4:54:44 PM	PHl3 MFC set to  0.000000
5/6/2011	4:54:44 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:54:44 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:54:44 PM	Tube furnace set to 0
5/6/2011	4:55:44 PM	Helium valve closed
5/6/2011	4:55:44 PM	H2 valve closed
5/6/2011	4:55:44 PM	BCl3 valve closed
5/6/2011	4:55:44 PM	PH3 valve closed
5/6/2011	4:55:44 PM	SiCl4 pre valve closed
5/6/2011	4:55:44 PM	SiCl4 post valve closed
5/6/2011	4:55:44 PM	Bubbler valve closed
5/6/2011	4:55:44 PM	Main Vac valve opened
5/6/2011	4:55:44 PM	Bypass valve opened
5/6/2011	4:55:44 PM	Helium MFC set to  0.000000
5/6/2011	4:55:44 PM	H2 MFC set to  0.000000
5/6/2011	4:55:44 PM	BCl3 MFC set to  0.000000
5/6/2011	4:55:44 PM	PHl3 MFC set to  0.000000
5/6/2011	4:55:44 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:55:44 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:55:44 PM	Tube furnace set to 0
5/6/2011	4:56:44 PM	H2 valve closed
5/6/2011	4:56:44 PM	BCl3 valve closed
5/6/2011	4:56:44 PM	PH3 valve closed
5/6/2011	4:56:44 PM	SiCl4 pre valve closed
5/6/2011	4:56:44 PM	SiCl4 post valve closed
5/6/2011	4:56:44 PM	Bubbler valve closed
5/6/2011	4:56:44 PM	Helium valve opened
5/6/2011	4:56:44 PM	Main Vac valve opened
5/6/2011	4:56:44 PM	Bypass valve opened
5/6/2011	4:56:44 PM	Helium MFC set to  100.000000
5/6/2011	4:56:44 PM	H2 MFC set to  0.000000
5/6/2011	4:56:44 PM	BCl3 MFC set to  0.000000
5/6/2011	4:56:44 PM	PHl3 MFC set to  0.000000
5/6/2011	4:56:44 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:56:44 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:56:44 PM	Tube furnace set to 0
5/6/2011	4:57:44 PM	Helium valve closed
5/6/2011	4:57:44 PM	H2 valve closed
5/6/2011	4:57:44 PM	BCl3 valve closed
5/6/2011	4:57:44 PM	PH3 valve closed
5/6/2011	4:57:44 PM	SiCl4 pre valve closed
5/6/2011	4:57:44 PM	SiCl4 post valve closed
5/6/2011	4:57:44 PM	Bubbler valve closed
5/6/2011	4:57:44 PM	Main Vac valve opened
5/6/2011	4:57:44 PM	Bypass valve opened
5/6/2011	4:57:44 PM	Helium MFC set to  0.000000
5/6/2011	4:57:44 PM	H2 MFC set to  0.000000
5/6/2011	4:57:44 PM	BCl3 MFC set to  0.000000
5/6/2011	4:57:44 PM	PHl3 MFC set to  0.000000
5/6/2011	4:57:44 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:57:44 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:57:44 PM	Tube furnace set to 0
5/6/2011	4:58:44 PM	H2 valve closed
5/6/2011	4:58:44 PM	BCl3 valve closed
5/6/2011	4:58:44 PM	PH3 valve closed
5/6/2011	4:58:44 PM	SiCl4 pre valve closed
5/6/2011	4:58:44 PM	SiCl4 post valve closed
5/6/2011	4:58:44 PM	Bubbler valve closed
5/6/2011	4:58:44 PM	Helium valve opened
5/6/2011	4:58:44 PM	Main Vac valve opened
5/6/2011	4:58:44 PM	Bypass valve opened
5/6/2011	4:58:44 PM	Helium MFC set to  100.000000
5/6/2011	4:58:44 PM	H2 MFC set to  0.000000
5/6/2011	4:58:44 PM	BCl3 MFC set to  0.000000
5/6/2011	4:58:44 PM	PHl3 MFC set to  0.000000
5/6/2011	4:58:44 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:58:44 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:58:45 PM	Tube furnace set to 0
5/6/2011	4:59:45 PM	Helium valve closed
5/6/2011	4:59:45 PM	H2 valve closed
5/6/2011	4:59:45 PM	BCl3 valve closed
5/6/2011	4:59:45 PM	PH3 valve closed
5/6/2011	4:59:45 PM	SiCl4 pre valve closed
5/6/2011	4:59:45 PM	SiCl4 post valve closed
5/6/2011	4:59:45 PM	Bubbler valve closed
5/6/2011	4:59:45 PM	Main Vac valve opened
5/6/2011	4:59:45 PM	Bypass valve opened
5/6/2011	4:59:45 PM	Helium MFC set to  0.000000
5/6/2011	4:59:45 PM	H2 MFC set to  0.000000
5/6/2011	4:59:45 PM	BCl3 MFC set to  0.000000
5/6/2011	4:59:45 PM	PHl3 MFC set to  0.000000
5/6/2011	4:59:45 PM	SiCl4 MFC set to  0.000000
5/6/2011	4:59:45 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	4:59:45 PM	Tube furnace set to 0
5/6/2011	5:00:45 PM	H2 valve closed
5/6/2011	5:00:45 PM	BCl3 valve closed
5/6/2011	5:00:45 PM	PH3 valve closed
5/6/2011	5:00:45 PM	SiCl4 pre valve closed
5/6/2011	5:00:45 PM	SiCl4 post valve closed
5/6/2011	5:00:45 PM	Bubbler valve closed
5/6/2011	5:00:45 PM	Helium valve opened
5/6/2011	5:00:45 PM	Main Vac valve opened
5/6/2011	5:00:45 PM	Bypass valve opened
5/6/2011	5:00:45 PM	Helium MFC set to  100.000000
5/6/2011	5:00:45 PM	H2 MFC set to  0.000000
5/6/2011	5:00:45 PM	BCl3 MFC set to  0.000000
5/6/2011	5:00:45 PM	PHl3 MFC set to  0.000000
5/6/2011	5:00:45 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:00:45 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:00:45 PM	Tube furnace set to 0
5/6/2011	5:01:45 PM	Helium valve closed
5/6/2011	5:01:45 PM	H2 valve closed
5/6/2011	5:01:45 PM	BCl3 valve closed
5/6/2011	5:01:45 PM	PH3 valve closed
5/6/2011	5:01:45 PM	SiCl4 pre valve closed
5/6/2011	5:01:45 PM	SiCl4 post valve closed
5/6/2011	5:01:45 PM	Bubbler valve closed
5/6/2011	5:01:45 PM	Main Vac valve opened
5/6/2011	5:01:45 PM	Bypass valve opened
5/6/2011	5:01:45 PM	Helium MFC set to  0.000000
5/6/2011	5:01:45 PM	H2 MFC set to  0.000000
5/6/2011	5:01:45 PM	BCl3 MFC set to  0.000000
5/6/2011	5:01:45 PM	PHl3 MFC set to  0.000000
5/6/2011	5:01:45 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:01:45 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:01:45 PM	Tube furnace set to 0
5/6/2011	5:01:46 PM	Run finished at 5:01 PM
5/6/2011	5:01:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	5:05:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	5:06:06 PM	Recipe started at 5:06 PM
5/6/2011	5:06:06 PM	Helium valve closed
5/6/2011	5:06:06 PM	H2 valve closed
5/6/2011	5:06:06 PM	BCl3 valve closed
5/6/2011	5:06:06 PM	PH3 valve closed
5/6/2011	5:06:06 PM	SiCl4 pre valve closed
5/6/2011	5:06:06 PM	SiCl4 post valve closed
5/6/2011	5:06:06 PM	Main Vac valve closed
5/6/2011	5:06:06 PM	Bubbler valve closed
5/6/2011	5:06:06 PM	Bypass valve opened
5/6/2011	5:06:06 PM	Helium MFC set to  0.000000
5/6/2011	5:06:06 PM	H2 MFC set to  0.000000
5/6/2011	5:06:06 PM	BCl3 MFC set to  0.000000
5/6/2011	5:06:06 PM	PHl3 MFC set to  0.000000
5/6/2011	5:06:06 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:06:06 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:06:06 PM	Tube furnace set to 0
5/6/2011	5:06:06 PM	Helium valve closed
5/6/2011	5:06:06 PM	H2 valve closed
5/6/2011	5:06:06 PM	BCl3 valve closed
5/6/2011	5:06:06 PM	PH3 valve closed
5/6/2011	5:06:06 PM	SiCl4 pre valve closed
5/6/2011	5:06:06 PM	SiCl4 post valve closed
5/6/2011	5:06:06 PM	Bubbler valve closed
5/6/2011	5:06:06 PM	Main Vac valve opened
5/6/2011	5:06:06 PM	Bypass valve opened
5/6/2011	5:06:06 PM	Helium MFC set to  0.000000
5/6/2011	5:06:06 PM	H2 MFC set to  0.000000
5/6/2011	5:06:06 PM	BCl3 MFC set to  0.000000
5/6/2011	5:06:06 PM	PHl3 MFC set to  0.000000
5/6/2011	5:06:06 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:06:06 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:06:06 PM	Tube furnace set to 0
5/6/2011	5:07:06 PM	H2 valve closed
5/6/2011	5:07:06 PM	BCl3 valve closed
5/6/2011	5:07:06 PM	PH3 valve closed
5/6/2011	5:07:06 PM	SiCl4 pre valve closed
5/6/2011	5:07:06 PM	SiCl4 post valve closed
5/6/2011	5:07:06 PM	Bubbler valve closed
5/6/2011	5:07:06 PM	Helium valve opened
5/6/2011	5:07:06 PM	Main Vac valve opened
5/6/2011	5:07:06 PM	Bypass valve opened
5/6/2011	5:07:06 PM	Helium MFC set to  100.000000
5/6/2011	5:07:06 PM	H2 MFC set to  0.000000
5/6/2011	5:07:06 PM	BCl3 MFC set to  0.000000
5/6/2011	5:07:06 PM	PHl3 MFC set to  0.000000
5/6/2011	5:07:06 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:07:06 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:07:07 PM	Tube furnace set to 0
5/6/2011	5:08:07 PM	Helium valve closed
5/6/2011	5:08:07 PM	H2 valve closed
5/6/2011	5:08:07 PM	BCl3 valve closed
5/6/2011	5:08:07 PM	PH3 valve closed
5/6/2011	5:08:07 PM	SiCl4 pre valve closed
5/6/2011	5:08:07 PM	SiCl4 post valve closed
5/6/2011	5:08:07 PM	Bubbler valve closed
5/6/2011	5:08:07 PM	Main Vac valve opened
5/6/2011	5:08:07 PM	Bypass valve opened
5/6/2011	5:08:07 PM	Helium MFC set to  0.000000
5/6/2011	5:08:07 PM	H2 MFC set to  0.000000
5/6/2011	5:08:07 PM	BCl3 MFC set to  0.000000
5/6/2011	5:08:07 PM	PHl3 MFC set to  0.000000
5/6/2011	5:08:07 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:08:07 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:08:07 PM	Tube furnace set to 0
5/6/2011	5:09:07 PM	H2 valve closed
5/6/2011	5:09:07 PM	BCl3 valve closed
5/6/2011	5:09:07 PM	PH3 valve closed
5/6/2011	5:09:07 PM	SiCl4 pre valve closed
5/6/2011	5:09:07 PM	SiCl4 post valve closed
5/6/2011	5:09:07 PM	Bubbler valve closed
5/6/2011	5:09:07 PM	Helium valve opened
5/6/2011	5:09:07 PM	Main Vac valve opened
5/6/2011	5:09:07 PM	Bypass valve opened
5/6/2011	5:09:07 PM	Helium MFC set to  100.000000
5/6/2011	5:09:07 PM	H2 MFC set to  0.000000
5/6/2011	5:09:07 PM	BCl3 MFC set to  0.000000
5/6/2011	5:09:07 PM	PHl3 MFC set to  0.000000
5/6/2011	5:09:07 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:09:07 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:09:07 PM	Tube furnace set to 0
5/6/2011	5:10:07 PM	Helium valve closed
5/6/2011	5:10:07 PM	H2 valve closed
5/6/2011	5:10:07 PM	BCl3 valve closed
5/6/2011	5:10:07 PM	PH3 valve closed
5/6/2011	5:10:07 PM	SiCl4 pre valve closed
5/6/2011	5:10:07 PM	SiCl4 post valve closed
5/6/2011	5:10:07 PM	Bubbler valve closed
5/6/2011	5:10:07 PM	Main Vac valve opened
5/6/2011	5:10:07 PM	Bypass valve opened
5/6/2011	5:10:07 PM	Helium MFC set to  0.000000
5/6/2011	5:10:07 PM	H2 MFC set to  0.000000
5/6/2011	5:10:07 PM	BCl3 MFC set to  0.000000
5/6/2011	5:10:07 PM	PHl3 MFC set to  0.000000
5/6/2011	5:10:07 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:10:07 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:10:07 PM	Tube furnace set to 0
5/6/2011	5:11:07 PM	H2 valve closed
5/6/2011	5:11:07 PM	BCl3 valve closed
5/6/2011	5:11:07 PM	PH3 valve closed
5/6/2011	5:11:07 PM	SiCl4 pre valve closed
5/6/2011	5:11:07 PM	SiCl4 post valve closed
5/6/2011	5:11:07 PM	Bubbler valve closed
5/6/2011	5:11:07 PM	Helium valve opened
5/6/2011	5:11:07 PM	Main Vac valve opened
5/6/2011	5:11:07 PM	Bypass valve opened
5/6/2011	5:11:07 PM	Helium MFC set to  100.000000
5/6/2011	5:11:07 PM	H2 MFC set to  0.000000
5/6/2011	5:11:07 PM	BCl3 MFC set to  0.000000
5/6/2011	5:11:07 PM	PHl3 MFC set to  0.000000
5/6/2011	5:11:07 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:11:07 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:11:07 PM	Tube furnace set to 0
5/6/2011	5:12:07 PM	Helium valve closed
5/6/2011	5:12:07 PM	H2 valve closed
5/6/2011	5:12:07 PM	BCl3 valve closed
5/6/2011	5:12:07 PM	PH3 valve closed
5/6/2011	5:12:07 PM	SiCl4 pre valve closed
5/6/2011	5:12:07 PM	SiCl4 post valve closed
5/6/2011	5:12:07 PM	Bubbler valve closed
5/6/2011	5:12:07 PM	Main Vac valve opened
5/6/2011	5:12:07 PM	Bypass valve opened
5/6/2011	5:12:07 PM	Helium MFC set to  0.000000
5/6/2011	5:12:07 PM	H2 MFC set to  0.000000
5/6/2011	5:12:07 PM	BCl3 MFC set to  0.000000
5/6/2011	5:12:07 PM	PHl3 MFC set to  0.000000
5/6/2011	5:12:07 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:12:07 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:12:08 PM	Tube furnace set to 0
5/6/2011	5:13:08 PM	H2 valve closed
5/6/2011	5:13:08 PM	BCl3 valve closed
5/6/2011	5:13:08 PM	PH3 valve closed
5/6/2011	5:13:08 PM	SiCl4 pre valve closed
5/6/2011	5:13:08 PM	SiCl4 post valve closed
5/6/2011	5:13:08 PM	Bubbler valve closed
5/6/2011	5:13:08 PM	Helium valve opened
5/6/2011	5:13:08 PM	Main Vac valve opened
5/6/2011	5:13:08 PM	Bypass valve opened
5/6/2011	5:13:08 PM	Helium MFC set to  100.000000
5/6/2011	5:13:08 PM	H2 MFC set to  0.000000
5/6/2011	5:13:08 PM	BCl3 MFC set to  0.000000
5/6/2011	5:13:08 PM	PHl3 MFC set to  0.000000
5/6/2011	5:13:08 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:13:08 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:13:08 PM	Tube furnace set to 0
5/6/2011	5:14:08 PM	Helium valve closed
5/6/2011	5:14:08 PM	H2 valve closed
5/6/2011	5:14:08 PM	BCl3 valve closed
5/6/2011	5:14:08 PM	PH3 valve closed
5/6/2011	5:14:08 PM	SiCl4 pre valve closed
5/6/2011	5:14:08 PM	SiCl4 post valve closed
5/6/2011	5:14:08 PM	Bubbler valve closed
5/6/2011	5:14:08 PM	Main Vac valve opened
5/6/2011	5:14:08 PM	Bypass valve opened
5/6/2011	5:14:08 PM	Helium MFC set to  0.000000
5/6/2011	5:14:08 PM	H2 MFC set to  0.000000
5/6/2011	5:14:08 PM	BCl3 MFC set to  0.000000
5/6/2011	5:14:08 PM	PHl3 MFC set to  0.000000
5/6/2011	5:14:08 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:14:08 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:14:08 PM	Tube furnace set to 0
5/6/2011	5:15:08 PM	H2 valve closed
5/6/2011	5:15:08 PM	BCl3 valve closed
5/6/2011	5:15:08 PM	PH3 valve closed
5/6/2011	5:15:08 PM	SiCl4 pre valve closed
5/6/2011	5:15:08 PM	SiCl4 post valve closed
5/6/2011	5:15:08 PM	Bubbler valve closed
5/6/2011	5:15:08 PM	Helium valve opened
5/6/2011	5:15:08 PM	Main Vac valve opened
5/6/2011	5:15:08 PM	Bypass valve opened
5/6/2011	5:15:08 PM	Helium MFC set to  100.000000
5/6/2011	5:15:08 PM	H2 MFC set to  0.000000
5/6/2011	5:15:08 PM	BCl3 MFC set to  0.000000
5/6/2011	5:15:08 PM	PHl3 MFC set to  0.000000
5/6/2011	5:15:08 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:15:08 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:15:08 PM	Tube furnace set to 0
5/6/2011	5:16:08 PM	Helium valve closed
5/6/2011	5:16:08 PM	H2 valve closed
5/6/2011	5:16:08 PM	BCl3 valve closed
5/6/2011	5:16:08 PM	PH3 valve closed
5/6/2011	5:16:08 PM	SiCl4 pre valve closed
5/6/2011	5:16:08 PM	SiCl4 post valve closed
5/6/2011	5:16:08 PM	Bubbler valve closed
5/6/2011	5:16:08 PM	Main Vac valve opened
5/6/2011	5:16:08 PM	Bypass valve opened
5/6/2011	5:16:08 PM	Helium MFC set to  0.000000
5/6/2011	5:16:08 PM	H2 MFC set to  0.000000
5/6/2011	5:16:08 PM	BCl3 MFC set to  0.000000
5/6/2011	5:16:08 PM	PHl3 MFC set to  0.000000
5/6/2011	5:16:08 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:16:08 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:16:08 PM	Tube furnace set to 0
5/6/2011	5:17:08 PM	H2 valve closed
5/6/2011	5:17:08 PM	BCl3 valve closed
5/6/2011	5:17:08 PM	PH3 valve closed
5/6/2011	5:17:08 PM	SiCl4 pre valve closed
5/6/2011	5:17:08 PM	SiCl4 post valve closed
5/6/2011	5:17:08 PM	Bubbler valve closed
5/6/2011	5:17:08 PM	Helium valve opened
5/6/2011	5:17:08 PM	Main Vac valve opened
5/6/2011	5:17:08 PM	Bypass valve opened
5/6/2011	5:17:08 PM	Helium MFC set to  100.000000
5/6/2011	5:17:08 PM	H2 MFC set to  0.000000
5/6/2011	5:17:08 PM	BCl3 MFC set to  0.000000
5/6/2011	5:17:08 PM	PHl3 MFC set to  0.000000
5/6/2011	5:17:08 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:17:08 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:17:09 PM	Tube furnace set to 0
5/6/2011	5:18:09 PM	Helium valve closed
5/6/2011	5:18:09 PM	H2 valve closed
5/6/2011	5:18:09 PM	BCl3 valve closed
5/6/2011	5:18:09 PM	PH3 valve closed
5/6/2011	5:18:09 PM	SiCl4 pre valve closed
5/6/2011	5:18:09 PM	SiCl4 post valve closed
5/6/2011	5:18:09 PM	Bubbler valve closed
5/6/2011	5:18:09 PM	Main Vac valve opened
5/6/2011	5:18:09 PM	Bypass valve opened
5/6/2011	5:18:09 PM	Helium MFC set to  0.000000
5/6/2011	5:18:09 PM	H2 MFC set to  0.000000
5/6/2011	5:18:09 PM	BCl3 MFC set to  0.000000
5/6/2011	5:18:09 PM	PHl3 MFC set to  0.000000
5/6/2011	5:18:09 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:18:09 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:18:09 PM	Tube furnace set to 0
5/6/2011	5:19:09 PM	H2 valve closed
5/6/2011	5:19:09 PM	BCl3 valve closed
5/6/2011	5:19:09 PM	PH3 valve closed
5/6/2011	5:19:09 PM	SiCl4 pre valve closed
5/6/2011	5:19:09 PM	SiCl4 post valve closed
5/6/2011	5:19:09 PM	Bubbler valve closed
5/6/2011	5:19:09 PM	Helium valve opened
5/6/2011	5:19:09 PM	Main Vac valve opened
5/6/2011	5:19:09 PM	Bypass valve opened
5/6/2011	5:19:09 PM	Helium MFC set to  100.000000
5/6/2011	5:19:09 PM	H2 MFC set to  0.000000
5/6/2011	5:19:09 PM	BCl3 MFC set to  0.000000
5/6/2011	5:19:09 PM	PHl3 MFC set to  0.000000
5/6/2011	5:19:09 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:19:09 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:19:09 PM	Tube furnace set to 0
5/6/2011	5:20:09 PM	Helium valve closed
5/6/2011	5:20:09 PM	H2 valve closed
5/6/2011	5:20:09 PM	BCl3 valve closed
5/6/2011	5:20:09 PM	PH3 valve closed
5/6/2011	5:20:09 PM	SiCl4 pre valve closed
5/6/2011	5:20:09 PM	SiCl4 post valve closed
5/6/2011	5:20:09 PM	Bubbler valve closed
5/6/2011	5:20:09 PM	Main Vac valve opened
5/6/2011	5:20:09 PM	Bypass valve opened
5/6/2011	5:20:09 PM	Helium MFC set to  0.000000
5/6/2011	5:20:09 PM	H2 MFC set to  0.000000
5/6/2011	5:20:09 PM	BCl3 MFC set to  0.000000
5/6/2011	5:20:09 PM	PHl3 MFC set to  0.000000
5/6/2011	5:20:09 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:20:09 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:20:09 PM	Tube furnace set to 0
5/6/2011	5:21:09 PM	H2 valve closed
5/6/2011	5:21:09 PM	BCl3 valve closed
5/6/2011	5:21:09 PM	PH3 valve closed
5/6/2011	5:21:09 PM	SiCl4 pre valve closed
5/6/2011	5:21:09 PM	SiCl4 post valve closed
5/6/2011	5:21:09 PM	Bubbler valve closed
5/6/2011	5:21:09 PM	Helium valve opened
5/6/2011	5:21:09 PM	Main Vac valve opened
5/6/2011	5:21:09 PM	Bypass valve opened
5/6/2011	5:21:09 PM	Helium MFC set to  100.000000
5/6/2011	5:21:09 PM	H2 MFC set to  0.000000
5/6/2011	5:21:09 PM	BCl3 MFC set to  0.000000
5/6/2011	5:21:09 PM	PHl3 MFC set to  0.000000
5/6/2011	5:21:09 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:21:09 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:21:09 PM	Tube furnace set to 0
5/6/2011	5:22:09 PM	Helium valve closed
5/6/2011	5:22:09 PM	H2 valve closed
5/6/2011	5:22:09 PM	BCl3 valve closed
5/6/2011	5:22:09 PM	PH3 valve closed
5/6/2011	5:22:09 PM	SiCl4 pre valve closed
5/6/2011	5:22:09 PM	SiCl4 post valve closed
5/6/2011	5:22:09 PM	Bubbler valve closed
5/6/2011	5:22:09 PM	Main Vac valve opened
5/6/2011	5:22:09 PM	Bypass valve opened
5/6/2011	5:22:09 PM	Helium MFC set to  0.000000
5/6/2011	5:22:09 PM	H2 MFC set to  0.000000
5/6/2011	5:22:10 PM	BCl3 MFC set to  0.000000
5/6/2011	5:22:10 PM	PHl3 MFC set to  0.000000
5/6/2011	5:22:10 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:22:10 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:22:10 PM	Tube furnace set to 0
5/6/2011	5:23:10 PM	H2 valve closed
5/6/2011	5:23:10 PM	BCl3 valve closed
5/6/2011	5:23:10 PM	PH3 valve closed
5/6/2011	5:23:10 PM	SiCl4 pre valve closed
5/6/2011	5:23:10 PM	SiCl4 post valve closed
5/6/2011	5:23:10 PM	Bubbler valve closed
5/6/2011	5:23:10 PM	Helium valve opened
5/6/2011	5:23:10 PM	Main Vac valve opened
5/6/2011	5:23:10 PM	Bypass valve opened
5/6/2011	5:23:10 PM	Helium MFC set to  100.000000
5/6/2011	5:23:10 PM	H2 MFC set to  0.000000
5/6/2011	5:23:10 PM	BCl3 MFC set to  0.000000
5/6/2011	5:23:10 PM	PHl3 MFC set to  0.000000
5/6/2011	5:23:10 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:23:10 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:23:10 PM	Tube furnace set to 0
5/6/2011	5:24:10 PM	Helium valve closed
5/6/2011	5:24:10 PM	H2 valve closed
5/6/2011	5:24:10 PM	BCl3 valve closed
5/6/2011	5:24:10 PM	PH3 valve closed
5/6/2011	5:24:10 PM	SiCl4 pre valve closed
5/6/2011	5:24:10 PM	SiCl4 post valve closed
5/6/2011	5:24:10 PM	Bubbler valve closed
5/6/2011	5:24:10 PM	Main Vac valve opened
5/6/2011	5:24:10 PM	Bypass valve opened
5/6/2011	5:24:10 PM	Helium MFC set to  0.000000
5/6/2011	5:24:10 PM	H2 MFC set to  0.000000
5/6/2011	5:24:10 PM	BCl3 MFC set to  0.000000
5/6/2011	5:24:10 PM	PHl3 MFC set to  0.000000
5/6/2011	5:24:10 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:24:10 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:24:10 PM	Tube furnace set to 0
5/6/2011	5:25:10 PM	H2 valve closed
5/6/2011	5:25:10 PM	BCl3 valve closed
5/6/2011	5:25:10 PM	PH3 valve closed
5/6/2011	5:25:10 PM	SiCl4 pre valve closed
5/6/2011	5:25:10 PM	SiCl4 post valve closed
5/6/2011	5:25:10 PM	Bubbler valve closed
5/6/2011	5:25:10 PM	Helium valve opened
5/6/2011	5:25:10 PM	Main Vac valve opened
5/6/2011	5:25:10 PM	Bypass valve opened
5/6/2011	5:25:10 PM	Helium MFC set to  100.000000
5/6/2011	5:25:10 PM	H2 MFC set to  0.000000
5/6/2011	5:25:10 PM	BCl3 MFC set to  0.000000
5/6/2011	5:25:10 PM	PHl3 MFC set to  0.000000
5/6/2011	5:25:10 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:25:10 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:25:10 PM	Tube furnace set to 0
5/6/2011	5:26:10 PM	Helium valve closed
5/6/2011	5:26:10 PM	H2 valve closed
5/6/2011	5:26:10 PM	BCl3 valve closed
5/6/2011	5:26:10 PM	PH3 valve closed
5/6/2011	5:26:10 PM	SiCl4 pre valve closed
5/6/2011	5:26:10 PM	SiCl4 post valve closed
5/6/2011	5:26:10 PM	Bubbler valve closed
5/6/2011	5:26:10 PM	Main Vac valve opened
5/6/2011	5:26:10 PM	Bypass valve opened
5/6/2011	5:26:10 PM	Helium MFC set to  0.000000
5/6/2011	5:26:10 PM	H2 MFC set to  0.000000
5/6/2011	5:26:10 PM	BCl3 MFC set to  0.000000
5/6/2011	5:26:10 PM	PHl3 MFC set to  0.000000
5/6/2011	5:26:10 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:26:10 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:26:10 PM	Tube furnace set to 0
5/6/2011	5:26:11 PM	Run finished at 5:26 PM
5/6/2011	5:26:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	5:28:15 PM	Recipe started at 5:28 PM
5/6/2011	5:28:15 PM	Helium valve closed
5/6/2011	5:28:15 PM	BCl3 valve closed
5/6/2011	5:28:15 PM	PH3 valve closed
5/6/2011	5:28:15 PM	SiCl4 pre valve closed
5/6/2011	5:28:15 PM	SiCl4 post valve closed
5/6/2011	5:28:15 PM	Main Vac valve closed
5/6/2011	5:28:15 PM	Bypass valve closed
5/6/2011	5:28:15 PM	Bubbler valve closed
5/6/2011	5:28:15 PM	H2 valve opened
5/6/2011	5:28:15 PM	Helium MFC set to  0.000000
5/6/2011	5:28:15 PM	H2 MFC set to  500.000000
5/6/2011	5:28:15 PM	BCl3 MFC set to  0.000000
5/6/2011	5:28:15 PM	PHl3 MFC set to  0.000000
5/6/2011	5:28:15 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:28:15 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:28:15 PM	Tube furnace set to 0
5/6/2011	5:29:36 PM	Helium valve closed
5/6/2011	5:29:36 PM	BCl3 valve closed
5/6/2011	5:29:36 PM	PH3 valve closed
5/6/2011	5:29:36 PM	SiCl4 pre valve closed
5/6/2011	5:29:36 PM	SiCl4 post valve closed
5/6/2011	5:29:36 PM	Main Vac valve closed
5/6/2011	5:29:36 PM	Bypass valve closed
5/6/2011	5:29:36 PM	H2 valve opened
5/6/2011	5:29:36 PM	Bubbler valve opened
5/6/2011	5:29:36 PM	Helium MFC set to  0.000000
5/6/2011	5:29:36 PM	H2 MFC set to  500.000000
5/6/2011	5:29:36 PM	BCl3 MFC set to  0.000000
5/6/2011	5:29:36 PM	PHl3 MFC set to  0.000000
5/6/2011	5:29:36 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:29:36 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:29:36 PM	Tube furnace set to 1000
5/6/2011	5:49:36 PM	Helium valve closed
5/6/2011	5:49:36 PM	PH3 valve closed
5/6/2011	5:49:36 PM	Main Vac valve closed
5/6/2011	5:49:36 PM	Bypass valve closed
5/6/2011	5:49:36 PM	H2 valve opened
5/6/2011	5:49:36 PM	BCl3 valve opened
5/6/2011	5:49:36 PM	SiCl4 pre valve opened
5/6/2011	5:49:36 PM	SiCl4 post valve opened
5/6/2011	5:49:36 PM	Bubbler valve opened
5/6/2011	5:49:36 PM	Helium MFC set to  0.000000
5/6/2011	5:49:36 PM	H2 MFC set to  500.000000
5/6/2011	5:49:36 PM	BCl3 MFC set to  7.000000
5/6/2011	5:49:36 PM	PHl3 MFC set to  0.000000
5/6/2011	5:49:36 PM	SiCl4 MFC set to  75.000000
5/6/2011	5:49:36 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:49:36 PM	Tube furnace set to 1000
5/6/2011	5:59:36 PM	H2 valve closed
5/6/2011	5:59:36 PM	BCl3 valve closed
5/6/2011	5:59:36 PM	PH3 valve closed
5/6/2011	5:59:36 PM	SiCl4 pre valve closed
5/6/2011	5:59:37 PM	SiCl4 post valve closed
5/6/2011	5:59:37 PM	Main Vac valve closed
5/6/2011	5:59:37 PM	Bypass valve closed
5/6/2011	5:59:37 PM	Helium valve opened
5/6/2011	5:59:37 PM	Bubbler valve opened
5/6/2011	5:59:37 PM	Helium MFC set to  500.000000
5/6/2011	5:59:37 PM	H2 MFC set to  0.000000
5/6/2011	5:59:37 PM	BCl3 MFC set to  0.000000
5/6/2011	5:59:37 PM	PHl3 MFC set to  0.000000
5/6/2011	5:59:37 PM	SiCl4 MFC set to  0.000000
5/6/2011	5:59:37 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	5:59:37 PM	Tube furnace set to 0
5/6/2011	6:19:37 PM	Helium valve closed
5/6/2011	6:19:37 PM	H2 valve closed
5/6/2011	6:19:37 PM	BCl3 valve closed
5/6/2011	6:19:37 PM	PH3 valve closed
5/6/2011	6:19:37 PM	SiCl4 pre valve closed
5/6/2011	6:19:37 PM	SiCl4 post valve closed
5/6/2011	6:19:37 PM	Main Vac valve closed
5/6/2011	6:19:37 PM	Bypass valve closed
5/6/2011	6:19:37 PM	Bubbler valve closed
5/6/2011	6:19:37 PM	Helium MFC set to  0.000000
5/6/2011	6:19:37 PM	H2 MFC set to  0.000000
5/6/2011	6:19:37 PM	BCl3 MFC set to  0.000000
5/6/2011	6:19:37 PM	PHl3 MFC set to  0.000000
5/6/2011	6:19:37 PM	SiCl4 MFC set to  0.000000
5/6/2011	6:19:37 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	6:19:37 PM	Tube furnace set to 0
5/6/2011	6:19:37 PM	Run finished at 6:19 PM
5/6/2011	6:36:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	6:36:21 PM	Recipe started at 6:36 PM
5/6/2011	6:36:21 PM	Helium valve closed
5/6/2011	6:36:21 PM	H2 valve closed
5/6/2011	6:36:21 PM	BCl3 valve closed
5/6/2011	6:36:21 PM	PH3 valve closed
5/6/2011	6:36:21 PM	SiCl4 pre valve closed
5/6/2011	6:36:21 PM	SiCl4 post valve closed
5/6/2011	6:36:21 PM	Main Vac valve closed
5/6/2011	6:36:21 PM	Bubbler valve closed
5/6/2011	6:36:21 PM	Bypass valve opened
5/6/2011	6:36:21 PM	Helium MFC set to  0.000000
5/6/2011	6:36:21 PM	H2 MFC set to  0.000000
5/6/2011	6:36:21 PM	BCl3 MFC set to  0.000000
5/6/2011	6:36:21 PM	PHl3 MFC set to  0.000000
5/6/2011	6:36:21 PM	SiCl4 MFC set to  0.000000
5/6/2011	6:36:21 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	6:36:21 PM	Tube furnace set to 0
5/6/2011	6:36:54 PM	Helium valve closed
5/6/2011	6:36:54 PM	H2 valve closed
5/6/2011	6:36:54 PM	BCl3 valve closed
5/6/2011	6:36:54 PM	PH3 valve closed
5/6/2011	6:36:54 PM	SiCl4 pre valve closed
5/6/2011	6:36:54 PM	SiCl4 post valve closed
5/6/2011	6:36:54 PM	Bubbler valve closed
5/6/2011	6:36:54 PM	Main Vac valve opened
5/6/2011	6:36:54 PM	Bypass valve opened
5/6/2011	6:36:54 PM	Helium MFC set to  0.000000
5/6/2011	6:36:54 PM	H2 MFC set to  0.000000
5/6/2011	6:36:54 PM	BCl3 MFC set to  0.000000
5/6/2011	6:36:54 PM	PHl3 MFC set to  0.000000
5/6/2011	6:36:54 PM	SiCl4 MFC set to  0.000000
5/6/2011	6:36:54 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	6:36:54 PM	Tube furnace set to 0
5/6/2011	6:36:54 PM	Run finished at 6:36 PM
5/6/2011	6:36:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	8:18:00 PM	Program started after a nonstandard shutdown
5/6/2011	8:18:00 PM	Helium valve closed
5/6/2011	8:18:00 PM	H2 valve closed
5/6/2011	8:18:00 PM	BCl3 valve closed
5/6/2011	8:18:00 PM	PH3 valve closed
5/6/2011	8:18:00 PM	SiCl4 pre valve closed
5/6/2011	8:18:00 PM	SiCl4 post valve closed
5/6/2011	8:18:00 PM	Main Vac valve closed
5/6/2011	8:18:00 PM	Bypass valve closed
5/6/2011	8:18:00 PM	Bubbler valve closed
5/6/2011	8:18:00 PM	Helium MFC set to  0.000000
5/6/2011	8:18:00 PM	H2 MFC set to  0.000000
5/6/2011	8:18:00 PM	BCl3 MFC set to  0.000000
5/6/2011	8:18:00 PM	PHl3 MFC set to  0.000000
5/6/2011	8:18:00 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:18:00 PM	Bypass solenoid MFC set to  760.000000
5/6/2011	8:18:00 PM	Tube furnace set to 0
5/6/2011	8:18:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	8:18:15 PM	Recipe started at 8:18 PM
5/6/2011	8:18:15 PM	Helium valve closed
5/6/2011	8:18:15 PM	H2 valve closed
5/6/2011	8:18:15 PM	BCl3 valve closed
5/6/2011	8:18:15 PM	PH3 valve closed
5/6/2011	8:18:15 PM	SiCl4 pre valve closed
5/6/2011	8:18:15 PM	SiCl4 post valve closed
5/6/2011	8:18:15 PM	Main Vac valve closed
5/6/2011	8:18:15 PM	Bubbler valve closed
5/6/2011	8:18:15 PM	Bypass valve opened
5/6/2011	8:18:15 PM	Helium MFC set to  0.000000
5/6/2011	8:18:15 PM	H2 MFC set to  0.000000
5/6/2011	8:18:15 PM	BCl3 MFC set to  0.000000
5/6/2011	8:18:15 PM	PHl3 MFC set to  0.000000
5/6/2011	8:18:15 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:18:15 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:18:15 PM	Tube furnace set to 0
5/6/2011	8:18:15 PM	Run aborted at 8:18 PM
5/6/2011	8:18:15 PM	Helium valve closed
5/6/2011	8:18:15 PM	H2 valve closed
5/6/2011	8:18:15 PM	BCl3 valve closed
5/6/2011	8:18:15 PM	PH3 valve closed
5/6/2011	8:18:15 PM	SiCl4 pre valve closed
5/6/2011	8:18:15 PM	SiCl4 post valve closed
5/6/2011	8:18:15 PM	Bypass valve closed
5/6/2011	8:18:15 PM	Main Vac valve closed
5/6/2011	8:18:15 PM	Bubbler valve closed
5/6/2011	8:18:15 PM	Helium MFC set to  0.000000
5/6/2011	8:18:15 PM	H2 MFC set to  0.000000
5/6/2011	8:18:15 PM	BCl3 MFC set to  0.000000
5/6/2011	8:18:16 PM	PHl3 MFC set to  0.000000
5/6/2011	8:18:16 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:18:16 PM	Tube furnace set to 0
5/6/2011	8:18:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	8:18:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	8:18:19 PM	Recipe started at 8:18 PM
5/6/2011	8:18:19 PM	Helium valve closed
5/6/2011	8:18:19 PM	H2 valve closed
5/6/2011	8:18:19 PM	BCl3 valve closed
5/6/2011	8:18:19 PM	PH3 valve closed
5/6/2011	8:18:19 PM	SiCl4 pre valve closed
5/6/2011	8:18:19 PM	SiCl4 post valve closed
5/6/2011	8:18:19 PM	Main Vac valve closed
5/6/2011	8:18:19 PM	Bubbler valve closed
5/6/2011	8:18:19 PM	Bypass valve opened
5/6/2011	8:18:19 PM	Helium MFC set to  0.000000
5/6/2011	8:18:19 PM	H2 MFC set to  0.000000
5/6/2011	8:18:19 PM	BCl3 MFC set to  0.000000
5/6/2011	8:18:19 PM	PHl3 MFC set to  0.000000
5/6/2011	8:18:19 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:18:19 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:18:19 PM	Tube furnace set to 0
5/6/2011	8:18:19 PM	Helium valve closed
5/6/2011	8:18:19 PM	H2 valve closed
5/6/2011	8:18:19 PM	BCl3 valve closed
5/6/2011	8:18:19 PM	PH3 valve closed
5/6/2011	8:18:19 PM	SiCl4 pre valve closed
5/6/2011	8:18:19 PM	SiCl4 post valve closed
5/6/2011	8:18:19 PM	Bubbler valve closed
5/6/2011	8:18:19 PM	Main Vac valve opened
5/6/2011	8:18:19 PM	Bypass valve opened
5/6/2011	8:18:19 PM	Helium MFC set to  0.000000
5/6/2011	8:18:19 PM	H2 MFC set to  0.000000
5/6/2011	8:18:19 PM	BCl3 MFC set to  0.000000
5/6/2011	8:18:19 PM	PHl3 MFC set to  0.000000
5/6/2011	8:18:19 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:18:19 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:18:19 PM	Tube furnace set to 0
5/6/2011	8:18:19 PM	Run finished at 8:18 PM
5/6/2011	8:18:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	8:18:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	8:18:38 PM	Recipe started at 8:18 PM
5/6/2011	8:18:38 PM	Helium valve closed
5/6/2011	8:18:38 PM	H2 valve closed
5/6/2011	8:18:38 PM	BCl3 valve closed
5/6/2011	8:18:38 PM	PH3 valve closed
5/6/2011	8:18:38 PM	SiCl4 pre valve closed
5/6/2011	8:18:38 PM	SiCl4 post valve closed
5/6/2011	8:18:38 PM	Main Vac valve closed
5/6/2011	8:18:38 PM	Bubbler valve closed
5/6/2011	8:18:38 PM	Bypass valve opened
5/6/2011	8:18:38 PM	Helium MFC set to  0.000000
5/6/2011	8:18:38 PM	H2 MFC set to  0.000000
5/6/2011	8:18:38 PM	BCl3 MFC set to  0.000000
5/6/2011	8:18:38 PM	PHl3 MFC set to  0.000000
5/6/2011	8:18:38 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:18:38 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:18:38 PM	Tube furnace set to 0
5/6/2011	8:18:38 PM	Helium valve closed
5/6/2011	8:18:38 PM	H2 valve closed
5/6/2011	8:18:38 PM	BCl3 valve closed
5/6/2011	8:18:38 PM	PH3 valve closed
5/6/2011	8:18:38 PM	SiCl4 pre valve closed
5/6/2011	8:18:38 PM	SiCl4 post valve closed
5/6/2011	8:18:38 PM	Bubbler valve closed
5/6/2011	8:18:38 PM	Main Vac valve opened
5/6/2011	8:18:38 PM	Bypass valve opened
5/6/2011	8:18:38 PM	Helium MFC set to  0.000000
5/6/2011	8:18:38 PM	H2 MFC set to  0.000000
5/6/2011	8:18:38 PM	BCl3 MFC set to  0.000000
5/6/2011	8:18:38 PM	PHl3 MFC set to  0.000000
5/6/2011	8:18:38 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:18:38 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:18:38 PM	Tube furnace set to 0
5/6/2011	8:19:38 PM	H2 valve closed
5/6/2011	8:19:38 PM	BCl3 valve closed
5/6/2011	8:19:38 PM	PH3 valve closed
5/6/2011	8:19:38 PM	SiCl4 pre valve closed
5/6/2011	8:19:38 PM	SiCl4 post valve closed
5/6/2011	8:19:38 PM	Bubbler valve closed
5/6/2011	8:19:38 PM	Helium valve opened
5/6/2011	8:19:38 PM	Main Vac valve opened
5/6/2011	8:19:38 PM	Bypass valve opened
5/6/2011	8:19:38 PM	Helium MFC set to  100.000000
5/6/2011	8:19:39 PM	H2 MFC set to  0.000000
5/6/2011	8:19:39 PM	BCl3 MFC set to  0.000000
5/6/2011	8:19:39 PM	PHl3 MFC set to  0.000000
5/6/2011	8:19:39 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:19:39 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:19:39 PM	Tube furnace set to 0
5/6/2011	8:20:39 PM	Helium valve closed
5/6/2011	8:20:39 PM	H2 valve closed
5/6/2011	8:20:39 PM	BCl3 valve closed
5/6/2011	8:20:39 PM	PH3 valve closed
5/6/2011	8:20:39 PM	SiCl4 pre valve closed
5/6/2011	8:20:39 PM	SiCl4 post valve closed
5/6/2011	8:20:39 PM	Bubbler valve closed
5/6/2011	8:20:39 PM	Main Vac valve opened
5/6/2011	8:20:39 PM	Bypass valve opened
5/6/2011	8:20:39 PM	Helium MFC set to  0.000000
5/6/2011	8:20:39 PM	H2 MFC set to  0.000000
5/6/2011	8:20:39 PM	BCl3 MFC set to  0.000000
5/6/2011	8:20:39 PM	PHl3 MFC set to  0.000000
5/6/2011	8:20:39 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:20:39 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:20:39 PM	Tube furnace set to 0
5/6/2011	8:21:39 PM	H2 valve closed
5/6/2011	8:21:39 PM	BCl3 valve closed
5/6/2011	8:21:39 PM	PH3 valve closed
5/6/2011	8:21:39 PM	SiCl4 pre valve closed
5/6/2011	8:21:39 PM	SiCl4 post valve closed
5/6/2011	8:21:39 PM	Bubbler valve closed
5/6/2011	8:21:39 PM	Helium valve opened
5/6/2011	8:21:39 PM	Main Vac valve opened
5/6/2011	8:21:39 PM	Bypass valve opened
5/6/2011	8:21:39 PM	Helium MFC set to  100.000000
5/6/2011	8:21:39 PM	H2 MFC set to  0.000000
5/6/2011	8:21:39 PM	BCl3 MFC set to  0.000000
5/6/2011	8:21:39 PM	PHl3 MFC set to  0.000000
5/6/2011	8:21:39 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:21:39 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:21:39 PM	Tube furnace set to 0
5/6/2011	8:22:39 PM	Helium valve closed
5/6/2011	8:22:39 PM	H2 valve closed
5/6/2011	8:22:39 PM	BCl3 valve closed
5/6/2011	8:22:39 PM	PH3 valve closed
5/6/2011	8:22:39 PM	SiCl4 pre valve closed
5/6/2011	8:22:39 PM	SiCl4 post valve closed
5/6/2011	8:22:39 PM	Bubbler valve closed
5/6/2011	8:22:39 PM	Main Vac valve opened
5/6/2011	8:22:39 PM	Bypass valve opened
5/6/2011	8:22:39 PM	Helium MFC set to  0.000000
5/6/2011	8:22:39 PM	H2 MFC set to  0.000000
5/6/2011	8:22:39 PM	BCl3 MFC set to  0.000000
5/6/2011	8:22:39 PM	PHl3 MFC set to  0.000000
5/6/2011	8:22:39 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:22:39 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:22:39 PM	Tube furnace set to 0
5/6/2011	8:23:39 PM	H2 valve closed
5/6/2011	8:23:39 PM	BCl3 valve closed
5/6/2011	8:23:39 PM	PH3 valve closed
5/6/2011	8:23:39 PM	SiCl4 pre valve closed
5/6/2011	8:23:39 PM	SiCl4 post valve closed
5/6/2011	8:23:39 PM	Bubbler valve closed
5/6/2011	8:23:39 PM	Helium valve opened
5/6/2011	8:23:39 PM	Main Vac valve opened
5/6/2011	8:23:39 PM	Bypass valve opened
5/6/2011	8:23:39 PM	Helium MFC set to  100.000000
5/6/2011	8:23:39 PM	H2 MFC set to  0.000000
5/6/2011	8:23:39 PM	BCl3 MFC set to  0.000000
5/6/2011	8:23:39 PM	PHl3 MFC set to  0.000000
5/6/2011	8:23:39 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:23:39 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:23:39 PM	Tube furnace set to 0
5/6/2011	8:24:39 PM	Helium valve closed
5/6/2011	8:24:39 PM	H2 valve closed
5/6/2011	8:24:39 PM	BCl3 valve closed
5/6/2011	8:24:39 PM	PH3 valve closed
5/6/2011	8:24:40 PM	SiCl4 pre valve closed
5/6/2011	8:24:40 PM	SiCl4 post valve closed
5/6/2011	8:24:40 PM	Bubbler valve closed
5/6/2011	8:24:40 PM	Main Vac valve opened
5/6/2011	8:24:40 PM	Bypass valve opened
5/6/2011	8:24:40 PM	Helium MFC set to  0.000000
5/6/2011	8:24:40 PM	H2 MFC set to  0.000000
5/6/2011	8:24:40 PM	BCl3 MFC set to  0.000000
5/6/2011	8:24:40 PM	PHl3 MFC set to  0.000000
5/6/2011	8:24:40 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:24:40 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:24:40 PM	Tube furnace set to 0
5/6/2011	8:25:40 PM	H2 valve closed
5/6/2011	8:25:40 PM	BCl3 valve closed
5/6/2011	8:25:40 PM	PH3 valve closed
5/6/2011	8:25:40 PM	SiCl4 pre valve closed
5/6/2011	8:25:40 PM	SiCl4 post valve closed
5/6/2011	8:25:40 PM	Bubbler valve closed
5/6/2011	8:25:40 PM	Helium valve opened
5/6/2011	8:25:40 PM	Main Vac valve opened
5/6/2011	8:25:40 PM	Bypass valve opened
5/6/2011	8:25:40 PM	Helium MFC set to  100.000000
5/6/2011	8:25:40 PM	H2 MFC set to  0.000000
5/6/2011	8:25:40 PM	BCl3 MFC set to  0.000000
5/6/2011	8:25:40 PM	PHl3 MFC set to  0.000000
5/6/2011	8:25:40 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:25:40 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:25:40 PM	Tube furnace set to 0
5/6/2011	8:26:40 PM	Helium valve closed
5/6/2011	8:26:40 PM	H2 valve closed
5/6/2011	8:26:40 PM	BCl3 valve closed
5/6/2011	8:26:40 PM	PH3 valve closed
5/6/2011	8:26:40 PM	SiCl4 pre valve closed
5/6/2011	8:26:40 PM	SiCl4 post valve closed
5/6/2011	8:26:40 PM	Bubbler valve closed
5/6/2011	8:26:40 PM	Main Vac valve opened
5/6/2011	8:26:40 PM	Bypass valve opened
5/6/2011	8:26:40 PM	Helium MFC set to  0.000000
5/6/2011	8:26:40 PM	H2 MFC set to  0.000000
5/6/2011	8:26:40 PM	BCl3 MFC set to  0.000000
5/6/2011	8:26:40 PM	PHl3 MFC set to  0.000000
5/6/2011	8:26:40 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:26:40 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:26:40 PM	Tube furnace set to 0
5/6/2011	8:27:40 PM	H2 valve closed
5/6/2011	8:27:40 PM	BCl3 valve closed
5/6/2011	8:27:40 PM	PH3 valve closed
5/6/2011	8:27:40 PM	SiCl4 pre valve closed
5/6/2011	8:27:40 PM	SiCl4 post valve closed
5/6/2011	8:27:40 PM	Bubbler valve closed
5/6/2011	8:27:40 PM	Helium valve opened
5/6/2011	8:27:40 PM	Main Vac valve opened
5/6/2011	8:27:40 PM	Bypass valve opened
5/6/2011	8:27:40 PM	Helium MFC set to  100.000000
5/6/2011	8:27:40 PM	H2 MFC set to  0.000000
5/6/2011	8:27:40 PM	BCl3 MFC set to  0.000000
5/6/2011	8:27:40 PM	PHl3 MFC set to  0.000000
5/6/2011	8:27:40 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:27:40 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:27:40 PM	Tube furnace set to 0
5/6/2011	8:28:40 PM	Helium valve closed
5/6/2011	8:28:40 PM	H2 valve closed
5/6/2011	8:28:40 PM	BCl3 valve closed
5/6/2011	8:28:40 PM	PH3 valve closed
5/6/2011	8:28:40 PM	SiCl4 pre valve closed
5/6/2011	8:28:40 PM	SiCl4 post valve closed
5/6/2011	8:28:40 PM	Bubbler valve closed
5/6/2011	8:28:40 PM	Main Vac valve opened
5/6/2011	8:28:40 PM	Bypass valve opened
5/6/2011	8:28:40 PM	Helium MFC set to  0.000000
5/6/2011	8:28:40 PM	H2 MFC set to  0.000000
5/6/2011	8:28:40 PM	BCl3 MFC set to  0.000000
5/6/2011	8:28:40 PM	PHl3 MFC set to  0.000000
5/6/2011	8:28:40 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:28:40 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:28:40 PM	Tube furnace set to 0
5/6/2011	8:29:41 PM	H2 valve closed
5/6/2011	8:29:41 PM	BCl3 valve closed
5/6/2011	8:29:41 PM	PH3 valve closed
5/6/2011	8:29:41 PM	SiCl4 pre valve closed
5/6/2011	8:29:41 PM	SiCl4 post valve closed
5/6/2011	8:29:41 PM	Bubbler valve closed
5/6/2011	8:29:41 PM	Helium valve opened
5/6/2011	8:29:41 PM	Main Vac valve opened
5/6/2011	8:29:41 PM	Bypass valve opened
5/6/2011	8:29:41 PM	Helium MFC set to  100.000000
5/6/2011	8:29:41 PM	H2 MFC set to  0.000000
5/6/2011	8:29:41 PM	BCl3 MFC set to  0.000000
5/6/2011	8:29:41 PM	PHl3 MFC set to  0.000000
5/6/2011	8:29:41 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:29:41 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:29:41 PM	Tube furnace set to 0
5/6/2011	8:30:41 PM	Helium valve closed
5/6/2011	8:30:41 PM	H2 valve closed
5/6/2011	8:30:41 PM	BCl3 valve closed
5/6/2011	8:30:41 PM	PH3 valve closed
5/6/2011	8:30:41 PM	SiCl4 pre valve closed
5/6/2011	8:30:41 PM	SiCl4 post valve closed
5/6/2011	8:30:41 PM	Bubbler valve closed
5/6/2011	8:30:41 PM	Main Vac valve opened
5/6/2011	8:30:41 PM	Bypass valve opened
5/6/2011	8:30:41 PM	Helium MFC set to  0.000000
5/6/2011	8:30:41 PM	H2 MFC set to  0.000000
5/6/2011	8:30:41 PM	BCl3 MFC set to  0.000000
5/6/2011	8:30:41 PM	PHl3 MFC set to  0.000000
5/6/2011	8:30:41 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:30:41 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:30:41 PM	Tube furnace set to 0
5/6/2011	8:31:41 PM	H2 valve closed
5/6/2011	8:31:41 PM	BCl3 valve closed
5/6/2011	8:31:41 PM	PH3 valve closed
5/6/2011	8:31:41 PM	SiCl4 pre valve closed
5/6/2011	8:31:41 PM	SiCl4 post valve closed
5/6/2011	8:31:41 PM	Bubbler valve closed
5/6/2011	8:31:41 PM	Helium valve opened
5/6/2011	8:31:41 PM	Main Vac valve opened
5/6/2011	8:31:41 PM	Bypass valve opened
5/6/2011	8:31:41 PM	Helium MFC set to  100.000000
5/6/2011	8:31:41 PM	H2 MFC set to  0.000000
5/6/2011	8:31:41 PM	BCl3 MFC set to  0.000000
5/6/2011	8:31:41 PM	PHl3 MFC set to  0.000000
5/6/2011	8:31:41 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:31:41 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:31:41 PM	Tube furnace set to 0
5/6/2011	8:32:41 PM	Helium valve closed
5/6/2011	8:32:41 PM	H2 valve closed
5/6/2011	8:32:41 PM	BCl3 valve closed
5/6/2011	8:32:41 PM	PH3 valve closed
5/6/2011	8:32:41 PM	SiCl4 pre valve closed
5/6/2011	8:32:41 PM	SiCl4 post valve closed
5/6/2011	8:32:41 PM	Bubbler valve closed
5/6/2011	8:32:41 PM	Main Vac valve opened
5/6/2011	8:32:41 PM	Bypass valve opened
5/6/2011	8:32:41 PM	Helium MFC set to  0.000000
5/6/2011	8:32:41 PM	H2 MFC set to  0.000000
5/6/2011	8:32:41 PM	BCl3 MFC set to  0.000000
5/6/2011	8:32:41 PM	PHl3 MFC set to  0.000000
5/6/2011	8:32:41 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:32:41 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:32:41 PM	Tube furnace set to 0
5/6/2011	8:33:41 PM	H2 valve closed
5/6/2011	8:33:41 PM	BCl3 valve closed
5/6/2011	8:33:41 PM	PH3 valve closed
5/6/2011	8:33:41 PM	SiCl4 pre valve closed
5/6/2011	8:33:41 PM	SiCl4 post valve closed
5/6/2011	8:33:41 PM	Bubbler valve closed
5/6/2011	8:33:41 PM	Helium valve opened
5/6/2011	8:33:41 PM	Main Vac valve opened
5/6/2011	8:33:41 PM	Bypass valve opened
5/6/2011	8:33:41 PM	Helium MFC set to  100.000000
5/6/2011	8:33:41 PM	H2 MFC set to  0.000000
5/6/2011	8:33:41 PM	BCl3 MFC set to  0.000000
5/6/2011	8:33:41 PM	PHl3 MFC set to  0.000000
5/6/2011	8:33:41 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:33:41 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:33:42 PM	Tube furnace set to 0
5/6/2011	8:34:42 PM	Helium valve closed
5/6/2011	8:34:42 PM	H2 valve closed
5/6/2011	8:34:42 PM	BCl3 valve closed
5/6/2011	8:34:42 PM	PH3 valve closed
5/6/2011	8:34:42 PM	SiCl4 pre valve closed
5/6/2011	8:34:42 PM	SiCl4 post valve closed
5/6/2011	8:34:42 PM	Bubbler valve closed
5/6/2011	8:34:42 PM	Main Vac valve opened
5/6/2011	8:34:42 PM	Bypass valve opened
5/6/2011	8:34:42 PM	Helium MFC set to  0.000000
5/6/2011	8:34:42 PM	H2 MFC set to  0.000000
5/6/2011	8:34:42 PM	BCl3 MFC set to  0.000000
5/6/2011	8:34:42 PM	PHl3 MFC set to  0.000000
5/6/2011	8:34:42 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:34:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:34:42 PM	Tube furnace set to 0
5/6/2011	8:35:42 PM	H2 valve closed
5/6/2011	8:35:42 PM	BCl3 valve closed
5/6/2011	8:35:42 PM	PH3 valve closed
5/6/2011	8:35:42 PM	SiCl4 pre valve closed
5/6/2011	8:35:42 PM	SiCl4 post valve closed
5/6/2011	8:35:42 PM	Bubbler valve closed
5/6/2011	8:35:42 PM	Helium valve opened
5/6/2011	8:35:42 PM	Main Vac valve opened
5/6/2011	8:35:42 PM	Bypass valve opened
5/6/2011	8:35:42 PM	Helium MFC set to  100.000000
5/6/2011	8:35:42 PM	H2 MFC set to  0.000000
5/6/2011	8:35:42 PM	BCl3 MFC set to  0.000000
5/6/2011	8:35:42 PM	PHl3 MFC set to  0.000000
5/6/2011	8:35:42 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:35:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:35:42 PM	Tube furnace set to 0
5/6/2011	8:36:42 PM	Helium valve closed
5/6/2011	8:36:42 PM	H2 valve closed
5/6/2011	8:36:42 PM	BCl3 valve closed
5/6/2011	8:36:42 PM	PH3 valve closed
5/6/2011	8:36:42 PM	SiCl4 pre valve closed
5/6/2011	8:36:42 PM	SiCl4 post valve closed
5/6/2011	8:36:42 PM	Bubbler valve closed
5/6/2011	8:36:42 PM	Main Vac valve opened
5/6/2011	8:36:42 PM	Bypass valve opened
5/6/2011	8:36:42 PM	Helium MFC set to  0.000000
5/6/2011	8:36:42 PM	H2 MFC set to  0.000000
5/6/2011	8:36:42 PM	BCl3 MFC set to  0.000000
5/6/2011	8:36:42 PM	PHl3 MFC set to  0.000000
5/6/2011	8:36:42 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:36:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:36:42 PM	Tube furnace set to 0
5/6/2011	8:37:42 PM	H2 valve closed
5/6/2011	8:37:42 PM	BCl3 valve closed
5/6/2011	8:37:42 PM	PH3 valve closed
5/6/2011	8:37:42 PM	SiCl4 pre valve closed
5/6/2011	8:37:42 PM	SiCl4 post valve closed
5/6/2011	8:37:42 PM	Bubbler valve closed
5/6/2011	8:37:42 PM	Helium valve opened
5/6/2011	8:37:42 PM	Main Vac valve opened
5/6/2011	8:37:42 PM	Bypass valve opened
5/6/2011	8:37:42 PM	Helium MFC set to  100.000000
5/6/2011	8:37:42 PM	H2 MFC set to  0.000000
5/6/2011	8:37:42 PM	BCl3 MFC set to  0.000000
5/6/2011	8:37:42 PM	PHl3 MFC set to  0.000000
5/6/2011	8:37:42 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:37:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:37:42 PM	Tube furnace set to 0
5/6/2011	8:38:42 PM	Helium valve closed
5/6/2011	8:38:42 PM	H2 valve closed
5/6/2011	8:38:42 PM	BCl3 valve closed
5/6/2011	8:38:42 PM	PH3 valve closed
5/6/2011	8:38:42 PM	SiCl4 pre valve closed
5/6/2011	8:38:42 PM	SiCl4 post valve closed
5/6/2011	8:38:42 PM	Bubbler valve closed
5/6/2011	8:38:42 PM	Main Vac valve opened
5/6/2011	8:38:42 PM	Bypass valve opened
5/6/2011	8:38:42 PM	Helium MFC set to  0.000000
5/6/2011	8:38:42 PM	H2 MFC set to  0.000000
5/6/2011	8:38:42 PM	BCl3 MFC set to  0.000000
5/6/2011	8:38:42 PM	PHl3 MFC set to  0.000000
5/6/2011	8:38:42 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:38:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:38:43 PM	Tube furnace set to 0
5/6/2011	8:38:44 PM	Run finished at 8:38 PM
5/6/2011	8:38:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	8:46:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	8:46:46 PM	Recipe started at 8:46 PM
5/6/2011	8:46:46 PM	Helium valve closed
5/6/2011	8:46:46 PM	H2 valve closed
5/6/2011	8:46:46 PM	BCl3 valve closed
5/6/2011	8:46:46 PM	PH3 valve closed
5/6/2011	8:46:46 PM	SiCl4 pre valve closed
5/6/2011	8:46:46 PM	SiCl4 post valve closed
5/6/2011	8:46:46 PM	Main Vac valve closed
5/6/2011	8:46:46 PM	Bubbler valve closed
5/6/2011	8:46:46 PM	Bypass valve opened
5/6/2011	8:46:46 PM	Helium MFC set to  0.000000
5/6/2011	8:46:46 PM	H2 MFC set to  0.000000
5/6/2011	8:46:46 PM	BCl3 MFC set to  0.000000
5/6/2011	8:46:46 PM	PHl3 MFC set to  0.000000
5/6/2011	8:46:46 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:46:46 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:46:47 PM	Tube furnace set to 0
5/6/2011	8:46:47 PM	Helium valve closed
5/6/2011	8:46:47 PM	H2 valve closed
5/6/2011	8:46:47 PM	BCl3 valve closed
5/6/2011	8:46:47 PM	PH3 valve closed
5/6/2011	8:46:47 PM	SiCl4 pre valve closed
5/6/2011	8:46:47 PM	SiCl4 post valve closed
5/6/2011	8:46:47 PM	Bubbler valve closed
5/6/2011	8:46:47 PM	Main Vac valve opened
5/6/2011	8:46:47 PM	Bypass valve opened
5/6/2011	8:46:47 PM	Helium MFC set to  0.000000
5/6/2011	8:46:47 PM	H2 MFC set to  0.000000
5/6/2011	8:46:47 PM	BCl3 MFC set to  0.000000
5/6/2011	8:46:47 PM	PHl3 MFC set to  0.000000
5/6/2011	8:46:47 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:46:47 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:46:47 PM	Tube furnace set to 0
5/6/2011	8:47:47 PM	H2 valve closed
5/6/2011	8:47:47 PM	BCl3 valve closed
5/6/2011	8:47:47 PM	PH3 valve closed
5/6/2011	8:47:47 PM	SiCl4 pre valve closed
5/6/2011	8:47:47 PM	SiCl4 post valve closed
5/6/2011	8:47:47 PM	Bubbler valve closed
5/6/2011	8:47:47 PM	Helium valve opened
5/6/2011	8:47:47 PM	Main Vac valve opened
5/6/2011	8:47:47 PM	Bypass valve opened
5/6/2011	8:47:47 PM	Helium MFC set to  100.000000
5/6/2011	8:47:47 PM	H2 MFC set to  0.000000
5/6/2011	8:47:47 PM	BCl3 MFC set to  0.000000
5/6/2011	8:47:47 PM	PHl3 MFC set to  0.000000
5/6/2011	8:47:47 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:47:47 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:47:47 PM	Tube furnace set to 0
5/6/2011	8:48:47 PM	Helium valve closed
5/6/2011	8:48:47 PM	H2 valve closed
5/6/2011	8:48:47 PM	BCl3 valve closed
5/6/2011	8:48:47 PM	PH3 valve closed
5/6/2011	8:48:47 PM	SiCl4 pre valve closed
5/6/2011	8:48:47 PM	SiCl4 post valve closed
5/6/2011	8:48:47 PM	Bubbler valve closed
5/6/2011	8:48:47 PM	Main Vac valve opened
5/6/2011	8:48:47 PM	Bypass valve opened
5/6/2011	8:48:47 PM	Helium MFC set to  0.000000
5/6/2011	8:48:47 PM	H2 MFC set to  0.000000
5/6/2011	8:48:47 PM	BCl3 MFC set to  0.000000
5/6/2011	8:48:47 PM	PHl3 MFC set to  0.000000
5/6/2011	8:48:47 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:48:47 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:48:47 PM	Tube furnace set to 0
5/6/2011	8:49:47 PM	H2 valve closed
5/6/2011	8:49:47 PM	BCl3 valve closed
5/6/2011	8:49:47 PM	PH3 valve closed
5/6/2011	8:49:47 PM	SiCl4 pre valve closed
5/6/2011	8:49:47 PM	SiCl4 post valve closed
5/6/2011	8:49:47 PM	Bubbler valve closed
5/6/2011	8:49:47 PM	Helium valve opened
5/6/2011	8:49:47 PM	Main Vac valve opened
5/6/2011	8:49:47 PM	Bypass valve opened
5/6/2011	8:49:47 PM	Helium MFC set to  100.000000
5/6/2011	8:49:47 PM	H2 MFC set to  0.000000
5/6/2011	8:49:47 PM	BCl3 MFC set to  0.000000
5/6/2011	8:49:47 PM	PHl3 MFC set to  0.000000
5/6/2011	8:49:47 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:49:47 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:49:48 PM	Tube furnace set to 0
5/6/2011	8:50:48 PM	Helium valve closed
5/6/2011	8:50:48 PM	H2 valve closed
5/6/2011	8:50:48 PM	BCl3 valve closed
5/6/2011	8:50:48 PM	PH3 valve closed
5/6/2011	8:50:48 PM	SiCl4 pre valve closed
5/6/2011	8:50:48 PM	SiCl4 post valve closed
5/6/2011	8:50:48 PM	Bubbler valve closed
5/6/2011	8:50:48 PM	Main Vac valve opened
5/6/2011	8:50:48 PM	Bypass valve opened
5/6/2011	8:50:48 PM	Helium MFC set to  0.000000
5/6/2011	8:50:48 PM	H2 MFC set to  0.000000
5/6/2011	8:50:48 PM	BCl3 MFC set to  0.000000
5/6/2011	8:50:48 PM	PHl3 MFC set to  0.000000
5/6/2011	8:50:48 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:50:48 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:50:48 PM	Tube furnace set to 0
5/6/2011	8:51:48 PM	H2 valve closed
5/6/2011	8:51:48 PM	BCl3 valve closed
5/6/2011	8:51:48 PM	PH3 valve closed
5/6/2011	8:51:48 PM	SiCl4 pre valve closed
5/6/2011	8:51:48 PM	SiCl4 post valve closed
5/6/2011	8:51:48 PM	Bubbler valve closed
5/6/2011	8:51:48 PM	Helium valve opened
5/6/2011	8:51:48 PM	Main Vac valve opened
5/6/2011	8:51:48 PM	Bypass valve opened
5/6/2011	8:51:48 PM	Helium MFC set to  100.000000
5/6/2011	8:51:48 PM	H2 MFC set to  0.000000
5/6/2011	8:51:48 PM	BCl3 MFC set to  0.000000
5/6/2011	8:51:48 PM	PHl3 MFC set to  0.000000
5/6/2011	8:51:48 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:51:48 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:51:48 PM	Tube furnace set to 0
5/6/2011	8:52:48 PM	Helium valve closed
5/6/2011	8:52:48 PM	H2 valve closed
5/6/2011	8:52:48 PM	BCl3 valve closed
5/6/2011	8:52:48 PM	PH3 valve closed
5/6/2011	8:52:48 PM	SiCl4 pre valve closed
5/6/2011	8:52:48 PM	SiCl4 post valve closed
5/6/2011	8:52:48 PM	Bubbler valve closed
5/6/2011	8:52:48 PM	Main Vac valve opened
5/6/2011	8:52:48 PM	Bypass valve opened
5/6/2011	8:52:48 PM	Helium MFC set to  0.000000
5/6/2011	8:52:48 PM	H2 MFC set to  0.000000
5/6/2011	8:52:48 PM	BCl3 MFC set to  0.000000
5/6/2011	8:52:48 PM	PHl3 MFC set to  0.000000
5/6/2011	8:52:48 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:52:48 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:52:48 PM	Tube furnace set to 0
5/6/2011	8:53:48 PM	H2 valve closed
5/6/2011	8:53:48 PM	BCl3 valve closed
5/6/2011	8:53:48 PM	PH3 valve closed
5/6/2011	8:53:48 PM	SiCl4 pre valve closed
5/6/2011	8:53:48 PM	SiCl4 post valve closed
5/6/2011	8:53:48 PM	Bubbler valve closed
5/6/2011	8:53:48 PM	Helium valve opened
5/6/2011	8:53:48 PM	Main Vac valve opened
5/6/2011	8:53:48 PM	Bypass valve opened
5/6/2011	8:53:48 PM	Helium MFC set to  100.000000
5/6/2011	8:53:48 PM	H2 MFC set to  0.000000
5/6/2011	8:53:48 PM	BCl3 MFC set to  0.000000
5/6/2011	8:53:48 PM	PHl3 MFC set to  0.000000
5/6/2011	8:53:48 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:53:48 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:53:48 PM	Tube furnace set to 0
5/6/2011	8:54:48 PM	Helium valve closed
5/6/2011	8:54:48 PM	H2 valve closed
5/6/2011	8:54:48 PM	BCl3 valve closed
5/6/2011	8:54:48 PM	PH3 valve closed
5/6/2011	8:54:48 PM	SiCl4 pre valve closed
5/6/2011	8:54:48 PM	SiCl4 post valve closed
5/6/2011	8:54:48 PM	Bubbler valve closed
5/6/2011	8:54:48 PM	Main Vac valve opened
5/6/2011	8:54:48 PM	Bypass valve opened
5/6/2011	8:54:48 PM	Helium MFC set to  0.000000
5/6/2011	8:54:48 PM	H2 MFC set to  0.000000
5/6/2011	8:54:48 PM	BCl3 MFC set to  0.000000
5/6/2011	8:54:48 PM	PHl3 MFC set to  0.000000
5/6/2011	8:54:48 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:54:48 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:54:49 PM	Tube furnace set to 0
5/6/2011	8:55:49 PM	H2 valve closed
5/6/2011	8:55:49 PM	BCl3 valve closed
5/6/2011	8:55:49 PM	PH3 valve closed
5/6/2011	8:55:49 PM	SiCl4 pre valve closed
5/6/2011	8:55:49 PM	SiCl4 post valve closed
5/6/2011	8:55:49 PM	Bubbler valve closed
5/6/2011	8:55:49 PM	Helium valve opened
5/6/2011	8:55:49 PM	Main Vac valve opened
5/6/2011	8:55:49 PM	Bypass valve opened
5/6/2011	8:55:49 PM	Helium MFC set to  100.000000
5/6/2011	8:55:49 PM	H2 MFC set to  0.000000
5/6/2011	8:55:49 PM	BCl3 MFC set to  0.000000
5/6/2011	8:55:49 PM	PHl3 MFC set to  0.000000
5/6/2011	8:55:49 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:55:49 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:55:49 PM	Tube furnace set to 0
5/6/2011	8:56:49 PM	Helium valve closed
5/6/2011	8:56:49 PM	H2 valve closed
5/6/2011	8:56:49 PM	BCl3 valve closed
5/6/2011	8:56:49 PM	PH3 valve closed
5/6/2011	8:56:49 PM	SiCl4 pre valve closed
5/6/2011	8:56:49 PM	SiCl4 post valve closed
5/6/2011	8:56:49 PM	Bubbler valve closed
5/6/2011	8:56:49 PM	Main Vac valve opened
5/6/2011	8:56:49 PM	Bypass valve opened
5/6/2011	8:56:49 PM	Helium MFC set to  0.000000
5/6/2011	8:56:49 PM	H2 MFC set to  0.000000
5/6/2011	8:56:49 PM	BCl3 MFC set to  0.000000
5/6/2011	8:56:49 PM	PHl3 MFC set to  0.000000
5/6/2011	8:56:49 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:56:49 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:56:49 PM	Tube furnace set to 0
5/6/2011	8:57:49 PM	H2 valve closed
5/6/2011	8:57:49 PM	BCl3 valve closed
5/6/2011	8:57:49 PM	PH3 valve closed
5/6/2011	8:57:49 PM	SiCl4 pre valve closed
5/6/2011	8:57:49 PM	SiCl4 post valve closed
5/6/2011	8:57:49 PM	Bubbler valve closed
5/6/2011	8:57:49 PM	Helium valve opened
5/6/2011	8:57:49 PM	Main Vac valve opened
5/6/2011	8:57:49 PM	Bypass valve opened
5/6/2011	8:57:49 PM	Helium MFC set to  100.000000
5/6/2011	8:57:49 PM	H2 MFC set to  0.000000
5/6/2011	8:57:49 PM	BCl3 MFC set to  0.000000
5/6/2011	8:57:49 PM	PHl3 MFC set to  0.000000
5/6/2011	8:57:49 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:57:49 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:57:49 PM	Tube furnace set to 0
5/6/2011	8:58:49 PM	Helium valve closed
5/6/2011	8:58:49 PM	H2 valve closed
5/6/2011	8:58:49 PM	BCl3 valve closed
5/6/2011	8:58:49 PM	PH3 valve closed
5/6/2011	8:58:49 PM	SiCl4 pre valve closed
5/6/2011	8:58:49 PM	SiCl4 post valve closed
5/6/2011	8:58:49 PM	Bubbler valve closed
5/6/2011	8:58:49 PM	Main Vac valve opened
5/6/2011	8:58:49 PM	Bypass valve opened
5/6/2011	8:58:49 PM	Helium MFC set to  0.000000
5/6/2011	8:58:49 PM	H2 MFC set to  0.000000
5/6/2011	8:58:49 PM	BCl3 MFC set to  0.000000
5/6/2011	8:58:49 PM	PHl3 MFC set to  0.000000
5/6/2011	8:58:49 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:58:49 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:58:49 PM	Tube furnace set to 0
5/6/2011	8:59:49 PM	H2 valve closed
5/6/2011	8:59:49 PM	BCl3 valve closed
5/6/2011	8:59:49 PM	PH3 valve closed
5/6/2011	8:59:49 PM	SiCl4 pre valve closed
5/6/2011	8:59:49 PM	SiCl4 post valve closed
5/6/2011	8:59:49 PM	Bubbler valve closed
5/6/2011	8:59:50 PM	Helium valve opened
5/6/2011	8:59:50 PM	Main Vac valve opened
5/6/2011	8:59:50 PM	Bypass valve opened
5/6/2011	8:59:50 PM	Helium MFC set to  100.000000
5/6/2011	8:59:50 PM	H2 MFC set to  0.000000
5/6/2011	8:59:50 PM	BCl3 MFC set to  0.000000
5/6/2011	8:59:50 PM	PHl3 MFC set to  0.000000
5/6/2011	8:59:50 PM	SiCl4 MFC set to  0.000000
5/6/2011	8:59:50 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	8:59:50 PM	Tube furnace set to 0
5/6/2011	9:00:50 PM	Helium valve closed
5/6/2011	9:00:50 PM	H2 valve closed
5/6/2011	9:00:50 PM	BCl3 valve closed
5/6/2011	9:00:50 PM	PH3 valve closed
5/6/2011	9:00:50 PM	SiCl4 pre valve closed
5/6/2011	9:00:50 PM	SiCl4 post valve closed
5/6/2011	9:00:50 PM	Bubbler valve closed
5/6/2011	9:00:50 PM	Main Vac valve opened
5/6/2011	9:00:50 PM	Bypass valve opened
5/6/2011	9:00:50 PM	Helium MFC set to  0.000000
5/6/2011	9:00:50 PM	H2 MFC set to  0.000000
5/6/2011	9:00:50 PM	BCl3 MFC set to  0.000000
5/6/2011	9:00:50 PM	PHl3 MFC set to  0.000000
5/6/2011	9:00:50 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:00:50 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:00:50 PM	Tube furnace set to 0
5/6/2011	9:01:50 PM	H2 valve closed
5/6/2011	9:01:50 PM	BCl3 valve closed
5/6/2011	9:01:50 PM	PH3 valve closed
5/6/2011	9:01:50 PM	SiCl4 pre valve closed
5/6/2011	9:01:50 PM	SiCl4 post valve closed
5/6/2011	9:01:50 PM	Bubbler valve closed
5/6/2011	9:01:50 PM	Helium valve opened
5/6/2011	9:01:50 PM	Main Vac valve opened
5/6/2011	9:01:50 PM	Bypass valve opened
5/6/2011	9:01:50 PM	Helium MFC set to  100.000000
5/6/2011	9:01:50 PM	H2 MFC set to  0.000000
5/6/2011	9:01:50 PM	BCl3 MFC set to  0.000000
5/6/2011	9:01:50 PM	PHl3 MFC set to  0.000000
5/6/2011	9:01:50 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:01:50 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:01:50 PM	Tube furnace set to 0
5/6/2011	9:02:50 PM	Helium valve closed
5/6/2011	9:02:50 PM	H2 valve closed
5/6/2011	9:02:50 PM	BCl3 valve closed
5/6/2011	9:02:50 PM	PH3 valve closed
5/6/2011	9:02:50 PM	SiCl4 pre valve closed
5/6/2011	9:02:50 PM	SiCl4 post valve closed
5/6/2011	9:02:50 PM	Bubbler valve closed
5/6/2011	9:02:50 PM	Main Vac valve opened
5/6/2011	9:02:50 PM	Bypass valve opened
5/6/2011	9:02:50 PM	Helium MFC set to  0.000000
5/6/2011	9:02:50 PM	H2 MFC set to  0.000000
5/6/2011	9:02:50 PM	BCl3 MFC set to  0.000000
5/6/2011	9:02:50 PM	PHl3 MFC set to  0.000000
5/6/2011	9:02:50 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:02:50 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:02:50 PM	Tube furnace set to 0
5/6/2011	9:03:50 PM	H2 valve closed
5/6/2011	9:03:50 PM	BCl3 valve closed
5/6/2011	9:03:50 PM	PH3 valve closed
5/6/2011	9:03:50 PM	SiCl4 pre valve closed
5/6/2011	9:03:50 PM	SiCl4 post valve closed
5/6/2011	9:03:50 PM	Bubbler valve closed
5/6/2011	9:03:50 PM	Helium valve opened
5/6/2011	9:03:50 PM	Main Vac valve opened
5/6/2011	9:03:50 PM	Bypass valve opened
5/6/2011	9:03:50 PM	Helium MFC set to  100.000000
5/6/2011	9:03:50 PM	H2 MFC set to  0.000000
5/6/2011	9:03:50 PM	BCl3 MFC set to  0.000000
5/6/2011	9:03:50 PM	PHl3 MFC set to  0.000000
5/6/2011	9:03:50 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:03:50 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:03:50 PM	Tube furnace set to 0
5/6/2011	9:04:50 PM	Helium valve closed
5/6/2011	9:04:50 PM	H2 valve closed
5/6/2011	9:04:51 PM	BCl3 valve closed
5/6/2011	9:04:51 PM	PH3 valve closed
5/6/2011	9:04:51 PM	SiCl4 pre valve closed
5/6/2011	9:04:51 PM	SiCl4 post valve closed
5/6/2011	9:04:51 PM	Bubbler valve closed
5/6/2011	9:04:51 PM	Main Vac valve opened
5/6/2011	9:04:51 PM	Bypass valve opened
5/6/2011	9:04:51 PM	Helium MFC set to  0.000000
5/6/2011	9:04:51 PM	H2 MFC set to  0.000000
5/6/2011	9:04:51 PM	BCl3 MFC set to  0.000000
5/6/2011	9:04:51 PM	PHl3 MFC set to  0.000000
5/6/2011	9:04:51 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:04:51 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:04:51 PM	Tube furnace set to 0
5/6/2011	9:05:51 PM	H2 valve closed
5/6/2011	9:05:51 PM	BCl3 valve closed
5/6/2011	9:05:51 PM	PH3 valve closed
5/6/2011	9:05:51 PM	SiCl4 pre valve closed
5/6/2011	9:05:51 PM	SiCl4 post valve closed
5/6/2011	9:05:51 PM	Bubbler valve closed
5/6/2011	9:05:51 PM	Helium valve opened
5/6/2011	9:05:51 PM	Main Vac valve opened
5/6/2011	9:05:51 PM	Bypass valve opened
5/6/2011	9:05:51 PM	Helium MFC set to  100.000000
5/6/2011	9:05:51 PM	H2 MFC set to  0.000000
5/6/2011	9:05:51 PM	BCl3 MFC set to  0.000000
5/6/2011	9:05:51 PM	PHl3 MFC set to  0.000000
5/6/2011	9:05:51 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:05:51 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:05:51 PM	Tube furnace set to 0
5/6/2011	9:06:51 PM	Helium valve closed
5/6/2011	9:06:51 PM	H2 valve closed
5/6/2011	9:06:51 PM	BCl3 valve closed
5/6/2011	9:06:51 PM	PH3 valve closed
5/6/2011	9:06:51 PM	SiCl4 pre valve closed
5/6/2011	9:06:51 PM	SiCl4 post valve closed
5/6/2011	9:06:51 PM	Bubbler valve closed
5/6/2011	9:06:51 PM	Main Vac valve opened
5/6/2011	9:06:51 PM	Bypass valve opened
5/6/2011	9:06:51 PM	Helium MFC set to  0.000000
5/6/2011	9:06:51 PM	H2 MFC set to  0.000000
5/6/2011	9:06:51 PM	BCl3 MFC set to  0.000000
5/6/2011	9:06:51 PM	PHl3 MFC set to  0.000000
5/6/2011	9:06:51 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:06:51 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:06:51 PM	Tube furnace set to 0
5/6/2011	9:06:52 PM	Run finished at 9:06 PM
5/6/2011	9:06:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/6/2011	9:08:06 PM	Recipe started at 9:08 PM
5/6/2011	9:08:06 PM	Helium valve closed
5/6/2011	9:08:06 PM	BCl3 valve closed
5/6/2011	9:08:06 PM	PH3 valve closed
5/6/2011	9:08:06 PM	SiCl4 pre valve closed
5/6/2011	9:08:06 PM	SiCl4 post valve closed
5/6/2011	9:08:06 PM	Main Vac valve closed
5/6/2011	9:08:06 PM	Bypass valve closed
5/6/2011	9:08:06 PM	Bubbler valve closed
5/6/2011	9:08:06 PM	H2 valve opened
5/6/2011	9:08:06 PM	Helium MFC set to  0.000000
5/6/2011	9:08:06 PM	H2 MFC set to  500.000000
5/6/2011	9:08:06 PM	BCl3 MFC set to  0.000000
5/6/2011	9:08:06 PM	PHl3 MFC set to  0.000000
5/6/2011	9:08:06 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:08:06 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:08:07 PM	Tube furnace set to 0
5/6/2011	9:08:57 PM	Run aborted at 9:08 PM
5/6/2011	9:08:57 PM	Helium valve closed
5/6/2011	9:08:57 PM	H2 valve closed
5/6/2011	9:08:57 PM	BCl3 valve closed
5/6/2011	9:08:57 PM	PH3 valve closed
5/6/2011	9:08:57 PM	SiCl4 pre valve closed
5/6/2011	9:08:57 PM	SiCl4 post valve closed
5/6/2011	9:08:57 PM	Bypass valve closed
5/6/2011	9:08:57 PM	Main Vac valve closed
5/6/2011	9:08:57 PM	Bubbler valve closed
5/6/2011	9:08:57 PM	Helium MFC set to  0.000000
5/6/2011	9:08:57 PM	H2 MFC set to  0.000000
5/6/2011	9:08:57 PM	BCl3 MFC set to  0.000000
5/6/2011	9:08:57 PM	PHl3 MFC set to  0.000000
5/6/2011	9:08:57 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:08:58 PM	Tube furnace set to 0
5/6/2011	9:09:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	9:09:01 PM	Recipe started at 9:09 PM
5/6/2011	9:09:01 PM	Helium valve closed
5/6/2011	9:09:01 PM	H2 valve closed
5/6/2011	9:09:01 PM	BCl3 valve closed
5/6/2011	9:09:01 PM	PH3 valve closed
5/6/2011	9:09:01 PM	SiCl4 pre valve closed
5/6/2011	9:09:01 PM	SiCl4 post valve closed
5/6/2011	9:09:01 PM	Main Vac valve closed
5/6/2011	9:09:01 PM	Bubbler valve closed
5/6/2011	9:09:01 PM	Bypass valve opened
5/6/2011	9:09:01 PM	Helium MFC set to  0.000000
5/6/2011	9:09:01 PM	H2 MFC set to  0.000000
5/6/2011	9:09:01 PM	BCl3 MFC set to  0.000000
5/6/2011	9:09:01 PM	PHl3 MFC set to  0.000000
5/6/2011	9:09:01 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:09:01 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:09:01 PM	Tube furnace set to 0
5/6/2011	9:09:14 PM	Helium valve closed
5/6/2011	9:09:14 PM	H2 valve closed
5/6/2011	9:09:14 PM	BCl3 valve closed
5/6/2011	9:09:14 PM	PH3 valve closed
5/6/2011	9:09:14 PM	SiCl4 pre valve closed
5/6/2011	9:09:14 PM	SiCl4 post valve closed
5/6/2011	9:09:14 PM	Bubbler valve closed
5/6/2011	9:09:14 PM	Main Vac valve opened
5/6/2011	9:09:14 PM	Bypass valve opened
5/6/2011	9:09:14 PM	Helium MFC set to  0.000000
5/6/2011	9:09:14 PM	H2 MFC set to  0.000000
5/6/2011	9:09:14 PM	BCl3 MFC set to  0.000000
5/6/2011	9:09:14 PM	PHl3 MFC set to  0.000000
5/6/2011	9:09:14 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:09:14 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:09:14 PM	Tube furnace set to 0
5/6/2011	9:09:14 PM	Run finished at 9:09 PM
5/6/2011	9:09:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	9:09:34 PM	Recipe started at 9:09 PM
5/6/2011	9:09:34 PM	Helium valve closed
5/6/2011	9:09:34 PM	BCl3 valve closed
5/6/2011	9:09:34 PM	PH3 valve closed
5/6/2011	9:09:34 PM	SiCl4 pre valve closed
5/6/2011	9:09:34 PM	SiCl4 post valve closed
5/6/2011	9:09:34 PM	Main Vac valve closed
5/6/2011	9:09:34 PM	Bypass valve closed
5/6/2011	9:09:34 PM	Bubbler valve closed
5/6/2011	9:09:34 PM	H2 valve opened
5/6/2011	9:09:34 PM	Helium MFC set to  0.000000
5/6/2011	9:09:34 PM	H2 MFC set to  500.000000
5/6/2011	9:09:34 PM	BCl3 MFC set to  0.000000
5/6/2011	9:09:34 PM	PHl3 MFC set to  0.000000
5/6/2011	9:09:34 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:09:34 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:09:34 PM	Tube furnace set to 0
5/6/2011	9:10:56 PM	Helium valve closed
5/6/2011	9:10:56 PM	BCl3 valve closed
5/6/2011	9:10:56 PM	PH3 valve closed
5/6/2011	9:10:56 PM	SiCl4 pre valve closed
5/6/2011	9:10:56 PM	SiCl4 post valve closed
5/6/2011	9:10:56 PM	Main Vac valve closed
5/6/2011	9:10:56 PM	Bypass valve closed
5/6/2011	9:10:56 PM	H2 valve opened
5/6/2011	9:10:56 PM	Bubbler valve opened
5/6/2011	9:10:56 PM	Helium MFC set to  0.000000
5/6/2011	9:10:56 PM	H2 MFC set to  500.000000
5/6/2011	9:10:56 PM	BCl3 MFC set to  0.000000
5/6/2011	9:10:56 PM	PHl3 MFC set to  0.000000
5/6/2011	9:10:56 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:10:56 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:10:56 PM	Tube furnace set to 1000
5/6/2011	9:30:56 PM	Helium valve closed
5/6/2011	9:30:56 PM	BCl3 valve closed
5/6/2011	9:30:56 PM	PH3 valve closed
5/6/2011	9:30:56 PM	Main Vac valve closed
5/6/2011	9:30:56 PM	Bypass valve closed
5/6/2011	9:30:56 PM	H2 valve opened
5/6/2011	9:30:56 PM	SiCl4 pre valve opened
5/6/2011	9:30:56 PM	SiCl4 post valve opened
5/6/2011	9:30:56 PM	Bubbler valve opened
5/6/2011	9:30:56 PM	Helium MFC set to  0.000000
5/6/2011	9:30:56 PM	H2 MFC set to  500.000000
5/6/2011	9:30:56 PM	BCl3 MFC set to  0.000000
5/6/2011	9:30:56 PM	PHl3 MFC set to  0.000000
5/6/2011	9:30:56 PM	SiCl4 MFC set to  75.000000
5/6/2011	9:30:56 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:30:56 PM	Tube furnace set to 1000
5/6/2011	9:50:56 PM	H2 valve closed
5/6/2011	9:50:56 PM	BCl3 valve closed
5/6/2011	9:50:56 PM	PH3 valve closed
5/6/2011	9:50:56 PM	SiCl4 pre valve closed
5/6/2011	9:50:56 PM	SiCl4 post valve closed
5/6/2011	9:50:56 PM	Main Vac valve closed
5/6/2011	9:50:56 PM	Bypass valve closed
5/6/2011	9:50:56 PM	Helium valve opened
5/6/2011	9:50:56 PM	Bubbler valve opened
5/6/2011	9:50:56 PM	Helium MFC set to  500.000000
5/6/2011	9:50:56 PM	H2 MFC set to  0.000000
5/6/2011	9:50:56 PM	BCl3 MFC set to  0.000000
5/6/2011	9:50:56 PM	PHl3 MFC set to  0.000000
5/6/2011	9:50:56 PM	SiCl4 MFC set to  0.000000
5/6/2011	9:50:56 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	9:50:56 PM	Tube furnace set to 0
5/6/2011	10:10:56 PM	Helium valve closed
5/6/2011	10:10:56 PM	H2 valve closed
5/6/2011	10:10:56 PM	BCl3 valve closed
5/6/2011	10:10:56 PM	PH3 valve closed
5/6/2011	10:10:56 PM	SiCl4 pre valve closed
5/6/2011	10:10:56 PM	SiCl4 post valve closed
5/6/2011	10:10:56 PM	Main Vac valve closed
5/6/2011	10:10:56 PM	Bypass valve closed
5/6/2011	10:10:56 PM	Bubbler valve closed
5/6/2011	10:10:56 PM	Helium MFC set to  0.000000
5/6/2011	10:10:56 PM	H2 MFC set to  0.000000
5/6/2011	10:10:56 PM	BCl3 MFC set to  0.000000
5/6/2011	10:10:56 PM	PHl3 MFC set to  0.000000
5/6/2011	10:10:56 PM	SiCl4 MFC set to  0.000000
5/6/2011	10:10:56 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	10:10:56 PM	Tube furnace set to 0
5/6/2011	10:10:57 PM	Run finished at 10:10 PM
5/6/2011	10:26:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/6/2011	10:26:42 PM	Recipe started at 10:26 PM
5/6/2011	10:26:42 PM	Helium valve closed
5/6/2011	10:26:42 PM	H2 valve closed
5/6/2011	10:26:42 PM	BCl3 valve closed
5/6/2011	10:26:42 PM	PH3 valve closed
5/6/2011	10:26:42 PM	SiCl4 pre valve closed
5/6/2011	10:26:42 PM	SiCl4 post valve closed
5/6/2011	10:26:42 PM	Main Vac valve closed
5/6/2011	10:26:42 PM	Bubbler valve closed
5/6/2011	10:26:42 PM	Bypass valve opened
5/6/2011	10:26:42 PM	Helium MFC set to  0.000000
5/6/2011	10:26:42 PM	H2 MFC set to  0.000000
5/6/2011	10:26:42 PM	BCl3 MFC set to  0.000000
5/6/2011	10:26:42 PM	PHl3 MFC set to  0.000000
5/6/2011	10:26:42 PM	SiCl4 MFC set to  0.000000
5/6/2011	10:26:42 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	10:26:42 PM	Tube furnace set to 0
5/6/2011	10:27:05 PM	Helium valve closed
5/6/2011	10:27:05 PM	H2 valve closed
5/6/2011	10:27:05 PM	BCl3 valve closed
5/6/2011	10:27:05 PM	PH3 valve closed
5/6/2011	10:27:05 PM	SiCl4 pre valve closed
5/6/2011	10:27:05 PM	SiCl4 post valve closed
5/6/2011	10:27:05 PM	Bubbler valve closed
5/6/2011	10:27:05 PM	Main Vac valve opened
5/6/2011	10:27:05 PM	Bypass valve opened
5/6/2011	10:27:05 PM	Helium MFC set to  0.000000
5/6/2011	10:27:05 PM	H2 MFC set to  0.000000
5/6/2011	10:27:05 PM	BCl3 MFC set to  0.000000
5/6/2011	10:27:05 PM	PHl3 MFC set to  0.000000
5/6/2011	10:27:05 PM	SiCl4 MFC set to  0.000000
5/6/2011	10:27:05 PM	Bypass solenoid MFC set to  0.000000
5/6/2011	10:27:06 PM	Tube furnace set to 0
5/6/2011	10:27:06 PM	Run finished at 10:27 PM
5/6/2011	10:27:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
